This paper presents a comprehensive CAD environment for MEMS/MST design. The design flow includes MEMS mechanical schematic entry, parameterized cell layout generation, LVS style error checking, lumped parameter macro-model generation, and system level modeling of the micro-system. The design environment also provides error checking between different design views. The implemented macromodel extraction technique can be used for micro-systems that can be represented as multi-component massspring-dashpot structures. Good accuracy is demonstrated in both spatial-domain and frequency-domain dynamic behavior of the models.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 163 - 167
Industry sector: Sensors, MEMS, Electronics
Topics: Modeling & Simulation of Microsystems