actuator – Page 2 – TechConnect Briefs

Modeling and simulation of a monolithic self-actuated microsystem for fluid sampling and drug delivery

Zhang P., Jullien G.A., University of Calgary, CA

A novel MEMS-based microsystem including microneedle array with a self-actuated structure for fluid sampling and drug delivery is modeled, designed and simulated. The self-actuating mechanism and the microneedle array are able to be fabricated on [...]

Shape Memory Alloy and Elastomer Composite MEMS Actuators

Fallon P.D., Gerratt A.P., Kierstead B.P., White R.D., Tufts University, US

Shape memory alloy (SMA) microactuators are under development for use in soft bodied robotics. These actuators take advantage of the shape memory effect of nickel-titanium alloys (nitinol) to deliver high force and large strain in [...]

Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering

Quenzer H.-J., Dudde R., Jacobsen H., Wagner B., Föll H., Fraunhofer ISIT, DE

Crack and void free polycrystalline Lead Zirconate Titanate (PZT) films in the range of 5 µm to 10 µm have been successfully deposited on silicon substrates using a novel high rate gas flow sputtering process. [...]

A Bio-Inspired Rotor Powered by a Micro-Bubble

Kao J., Warren J., Xu J., Attinger D., Columbia University, US

We present and characterize a novel micro-rotor actuation concept, where acoustic oscillations of a micro-bubble produce a steady fluid flow driving a microfabricated rotor at a rotating speed as high as 600 rpm. Developing micro-machines [...]

Design Optimisation of an Electrostatic MEMS Actuator with Low Spring Constant for an “Atom Chip”

Rouabah H.A., Gollasch C.O., Kraft M., University of Southampton, UK

The advance of MEMS based sensors and microfabrication techniques has facilitated innovative technologies such as so-called ‘atom chips’, where a cloud of ultra cold atoms in a Bose Einstein Condensate (BEC) is controlled and manipulated [...]

Single wall Carbon Nanotube Optical Actuators: Towards Optical Artificial Muscles

Lu S., Panchapakesan B., University of Delaware, US

The direct conversion of electrical energy to mechanical energy has been realized by various types of actuation technologies. But the direct conversion of optical energy to mechanical energy is rarely touched to date. Here we [...]

Platinum Nanowire Actuator: Metallic Artificial Muscles

Lu S., Sivakumar K., Panchapakesan B., University of Delaware, US

In this paper, we have fabricated platinum nanowires by using carbon nanotube as templates and have shown its applications for nanoactuation using electro-chemical actuation techniques.The strain response of the nanowire is measured and a total [...]

Modelling and Fabrication of Microspring Thermal Actuator

Luo J.K., Flewitt A.J., Spearing M., Fleck N.A., Milne W.I., University of Cambridge, UK

A new spring type microelectrothermal actuator with greatly enhanced displacement is proposed. Instead of using a single long chevron actuator, several chevrons are folded into a number of sections to become a spring-like actuator. Insulating [...]

Modeling and Analysis of Hysteresis Phenomena in Electrostatic Zipper Actuators

Guidotti P., Bernstein D., California Institute of Technology, US

We investigate the relationship between the pull-in phenomenon for electrostatic actuators and the hysteresis effect found in zipper actuators. Liked lumped mass and spring and tension based membrane models, we show that a beam model [...]

Mathematical Analysis of Electrostatically Actuated MEMS Devices

Bernstein D., Guidotti P., Pelesko J.A., California Institute of Technology, US

We perform a rigorous mathematical analysis of a simple membrane based model of an electrostatiacallyh actuated MEMS device. Using both analytical and numerical techniques, we prove the existence of a fold in the solution space [...]