Vehmas T. – TechConnect Briefs

Pressure Sensor Elements Integrated with CMOS

Kiihamäki J., Vehmas T., Suni T., Häärä A., Ylimaula M., Ruohio J., VTT Information Technology, FI

We report the measurement and fabrication results of monolithically integrated capacitive pressure sensor elements. The device fabrication process is based on novel plug-up process, which enables monolithical integration of sensors and CMOS in a modular [...]