Rouzaud A. – TechConnect Briefs

Towards generic platforms for MEMS manufacturing

Rouzaud A., Polizzi JP., Robert P., Arcamone J., CEA-LETI, FR

Coming at the time of technical maturity, MEMS industry requires now more standardization in manufacturing processes. This paper presents Leti’s contribution to develop generic platforms matching the suitable MEMS technologies within two distinct fields: physical [...]

Integration Approaches of Combining Micro and Nano Technologies

Rouzaud A., Robert Ph., Polizzi J.-Ph., Sillon N., LETI, FR

With an always growing penetration in different mass markets, MEMS are now facing a maturity period, with high constraints for manufacturing simplification and processes standardization in order to lower both costs and time-to-market. In light [...]