Rochus V. – TechConnect Briefs

Display Compatible pMUT Device for Mid Air Ultrasound Gesture Recognition

Huang C.H., Demi L., Mao S., Jeong Y., Cheyns D., Rottenberg X., Rochus V., IMEC, BE

1. BACKGROUND Recently, piezoelectric micromachined ultrasound transducers (pMUT) have proved their potential to make a reliable 2D ultrasound array. As shown in Fig. 1, the displacement of piezoelectric material layer is galvanised by electrical signals/acoustic [...]

Design considerations: From Micro-Opto-Mechanical Pressure Sensor (MOMPS) to Micro-Opto-Mechanical Microphones (MOMM)

Haouari R., Jansens R., Rochus V., Figeys B., Rottenberg X., Imec (Belgium) ; KU Leuven (Belgium), BE

With a trend towards a plethora of ‘smart’ devices, the MEMS microphone sector has maintained an exponential growth in recent years. For many applications microphones need to survive harsh environments or be bio-compatible. Micro-Opto-Mechanical-Pressure Sensor [...]

Micro-Opto-Mechanical Pressure Sensor (MOMPS) in Sin Integrated Photonics Platform

Jansen R., Rochus V., Goyvaerts J., Vandenboch G., van de Voort B., Neutens P., O’Callaghan J., Tilmans H.A.C., Rottenberg X., IMEC, BE

This paper presents a Micro-Opto-Mechanical Pressure Sensor (MOMPS) manufactured in a SiN integrated photonic platform for short wavelength implementation. It implements a single wavelength Mach Zehnder Interferometer (MZI) system allowing a simple readout system. We [...]

Transmit and Receive of a cMUT Cell: Modeling and Experiments

Mao S.P., Rottenberg X., Rochus V., Helin P., Verbist A., Severi S., Nauwelaers B., Tilmans H.A.C., IMEC, BE

This paper presents the modeling, simulation and experimental verification of the transmit and receive properties of a single cell capacitive micromachined ultrasonic transducer (cMUT). It is a confirmation that the equivalent circuit model provides a [...]

Optimization of a Poly-SiGe MEMS Xylophone Bar Magnetometer based on its equivalent circuit

Rochus V., Farghaly M., Rottenberg X., Tilmans H.A.C., IMEC, BE

This paper presents the optimization of a poly-SiGe-based MEMS Xylophone Bar Magnetometer (XBM) using a novel characterization method based on the measurement of the forward/backward transmission gains S21/S12 of the XBM treated as a two-port [...]

Novel Nanoelectromechanical Relay Design Procedure for Logic and Memory Applications

Rottenberg X., Rochus V., Jansen R., Ramezani M., Severi S., Witvrouw A., Tilmans H.A.C., IMEC, BE

NanoElectroMechanical Structures/Systems (NEMS) have been the focus of an increasing attention from researchers in recent years for the alternative they offer to conventional CMOS for application in logics, memory and in general digital circuitry. Scaled [...]

Low Motional Impedance Bulk Acoustic Resonators Based on Metamaterials

Rottenberg X., Jansen R., Rochus V., Figeys B., Nauwelaers B., Tilmans H.A.C., IMEC, BE

This paper presents the implementation of propagating acoustic metamaterials in electrostatically transduced Bulk Acoustic Resonators (BARs) to tune by design their characteristic properties. Novel in this paper is our focus on lowering the observed motional [...]

Correlation of Experimental and Numerical Results on Electrostatically Actuated Micro-Beams

Rochus V., Rixen D.J., Golinval J.-C., University of Liege, BE

The aim of this paper is to validate numerical simulations of electromechanical coupling in micro-structures using some experimental results. The micro-structures studied here consist in a micro-bridge and two cantilever beams. Multi-physics simulations of micro-electro-mechanical [...]

Finite Element Modeling of Electro-Mechanical Coupling in Capacitive Micro-Systems

Rochus V., Rixen D.J., Golinval J.-C., University of Liege, BE

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid [...]