Nouet P. – TechConnect Briefs

FEM study of a 3-axis thermal accelerometer based on free convection in a microcavity

Nguyen H.B., Mailly F., Latorre L., Nouet P., University Montpellier 2 / CNRS - LIRMM, FR

Thermal convective accelerometers are based on heat transfer in a sealed cavity filled with a fluid. The principle was patented in the 40’s and the first implementations on silicon, obtained with bulk micromachining, were reported [...]

Design & Simulation of a CMOS MEMS using Standard Microelectronic CAD Environment

Latorre L., Beroulle V., Nouet P., LIRMM, FR

This paper concerns the design and simulation of a CMOS MEMS-Based Spectrum Analyzer. A Mechanical structure is used for high-Q filtering. Modeling is presented together with associated Verilog-A module. Small signal analysis are then performed [...]

Modeling and Design Optimization of a CMOS Compatible MEMS

Latorre L., Bertrand Y., Hazard P., Pressecq F., Nouet P., LIRMM-CNRS, FR

Silicon etching at low temperature offers the possibility of manufacturing monolithic sensors with associated electronics. For a given technology, the so-called FSBM, we have established a set of relations to describe the mechanical behavior of [...]