Jansen R. – TechConnect Briefs

Micro-Opto-Mechanical Pressure Sensor (MOMPS) in Sin Integrated Photonics Platform

Jansen R., Rochus V., Goyvaerts J., Vandenboch G., van de Voort B., Neutens P., O’Callaghan J., Tilmans H.A.C., Rottenberg X., IMEC, BE

This paper presents a Micro-Opto-Mechanical Pressure Sensor (MOMPS) manufactured in a SiN integrated photonic platform for short wavelength implementation. It implements a single wavelength Mach Zehnder Interferometer (MZI) system allowing a simple readout system. We [...]

Novel Nanoelectromechanical Relay Design Procedure for Logic and Memory Applications

Rottenberg X., Rochus V., Jansen R., Ramezani M., Severi S., Witvrouw A., Tilmans H.A.C., IMEC, BE

NanoElectroMechanical Structures/Systems (NEMS) have been the focus of an increasing attention from researchers in recent years for the alternative they offer to conventional CMOS for application in logics, memory and in general digital circuitry. Scaled [...]

Low Motional Impedance Bulk Acoustic Resonators Based on Metamaterials

Rottenberg X., Jansen R., Rochus V., Figeys B., Nauwelaers B., Tilmans H.A.C., IMEC, BE

This paper presents the implementation of propagating acoustic metamaterials in electrostatically transduced Bulk Acoustic Resonators (BARs) to tune by design their characteristic properties. Novel in this paper is our focus on lowering the observed motional [...]

Passive Temperature-Compensation of MEM Resonators

Rottenberg X., Jansen R., Stoffels S., De Coster J., De Raedt W., De Coster J., De Raedt W., Tilmans H.A.C., IMEC, BE

MEM-resonators are recognized key components for future sensing, wireless and communications applications. Si-based resonators have gained special interest since they offer the perspective to replace bulky quartz resonators on-chip, maintaining high Q-factor and reaching high [...]