Harris A.J. – TechConnect Briefs

Mechanical Properties of Polycrystalline 3C-SiC Heteroepitaxial Layers

Pozzi M., Harris A.J., Burdess J.S., Lee K.K., Cheung R., Newcastle University, UK

Silicon carbide (SiC) is widely recognised as the leading candidate to replace silicon in Micro Electro-Mechanical Systems (MEMS) devices operating in harsh environments. The superiority of SiC over Si as regards mechanical, chemical and electronic [...]

Frequency Tuning of Micro-beams using Electrostatic Pull-in

Burdess J.S., Harris A.J., Kafumbe S., University of Newcastle, UK

The work reported shows how the frequency of vibration of simple beam structures can be changed significantly through the action of electrostatic pull-in. The application of a voltage between the beam and a supporting, but [...]

Active Damping Control in MEMS Using Parametric Pumping

Gallacher B.J., Burdess J.S., Harris A.J., Harish K.M., Newcastle University, UK

This paper reports on an excitation scheme that enables control of the damping of an electrostatically actuated MEMS sensor through combined external forcing and parametric excitation. System damping is of fundamental importance in vibratory MEMS [...]

MEMS Resonator Tuning using Focused Ion Beam Platinum Deposition

Enderling S., Jiang L., Ross A.W.S., Bond S., Hedley J., Harris A.J., Burdess J.S., Cheung R., Zorman C.A., Mehregany M., Walton A.J., University of Edinburgh, UK

This paper presents a novel post-fabrication tuning method which changes the resonant frequency of micromechanical beam resonators using Focused Ion Beam (FIB) deposition and removal of platinum. Tuning was achieved by depositing platinum on a [...]

Electrostatic Tuning of a Micro-Ring Gyroscope

Gallacher B.J., Hedley J., Burdess J.S., Harris A.J., Rickard A., King D., Insat University of Newcastle, UK

This paper describes a procedure for identifying and correcting anisoinertia and anisoelasticity present in a micro-ring gyroscope. The major disadvantages of popular tuning methods such as mass trimming using laser ablation or focussed ion beam [...]

Authors: Harris A.J.

Mechanical Properties of Polycrystalline 3C-SiC Heteroepitaxial Layers

Frequency Tuning of Micro-beams using Electrostatic Pull-in

Active Damping Control in MEMS Using Parametric Pumping

MEMS Resonator Tuning using Focused Ion Beam Platinum Deposition

Electrostatic Tuning of a Micro-Ring Gyroscope

Device Characterization at the Wafer Level via Optical Actuation and Detection

The Application of Parametric Excitation to a Micro-Ring Gyroscope

A Generic Sensor for Ultra Low Analyte Concentration Detection

Frequency Tuning of Silicon Micromechanical Cantilevers by Laser Ablation