Ellis M. – TechConnect Briefs

Realizing Complex Microsystems: A Deterministic Parallel Assembly Approach

Randall J., Hughes G., Geisberger A., Tsui K., Saini R., Ellis M., Skidmore G., Zyvex Corporation, US

The push towards miniaturization has created substantial interest in microelectromechanical systems (MEMS). To date, most of the developments regarding MEMS technology have relied on monolithic fabrication and integration. The monolithic approach has successfully produced various [...]

Dynamic Modeling and Input Shaping for MEMS

Popa D.O., Wen J.T., Stephanou H.E., Skidmore G., Ellis M., Rensselaer Polytechnic Institute, US

In this paper we show that the dynamic performance of MEMS devices can be significantly enhanced using reduced-order modeling techniques and open-loop control via input shaping. Specifically, we apply this methodology to a variety of [...]

Modeling Electrothermal Plastic Deformation

Geisberger A., Sarkar N., Ellis M., Skidmore G., Zyvex Corporation, US

Self-assembly of three-dimensional microstructures has been achieved using EPDA (Electrothermal Plastic Deformation Assembly). The EPDA process, in this case, is dependent on gold yielding within a gold and polysilicon bimorph. To plastically deform the bimorph [...]