Dangaria N. – TechConnect Briefs

Vapor Deposited Nanolaminates

Kobrin B., Grimes M., Dangaria N., Applied Microstructures, Inc., US

We present the latest developments in nanocoatings deposition technology, realized using Molecular Vapor Deposition (MVD®) method. Multi-layer nanolaminates of metal oxides (alumina, titania, silicon oxide, …etc.) and self-assembled monolayers (SAMs) sequentially deposited using an automated [...]

Low Temperature Nanolayers of Metal Oxides By MVD

Kobrin B., Dangaria N., Chinn J., Applied Microstructures, Inc., US

Molecular Vapor Deposition (MVDTM) techniques and equipment have been successfully used for many coating applications in the MEMS, disk drive, and nano-imprint lithography fields. By exploiting the ability of MVD to deposit an in-situ metal [...]