Residual Stress Characterization in MEMS Microbridges using Micro-Raman Spectroscopy
Starman_Jr. L.A., Ochoa E.M., Lott J.A., Amer M.S., Cowan W.D., Busbee J.D., Air Force Institute of Technology, US
We characterize and measure the pre-released residual stress levels in polysilicon Micro-Electro-Mechanical Systems (MEMS) microbridges using micro-Raman spectroscopy. Raman spectroscopy is nondestructive, fast, and provides the potential for in situ stress monitoring during fabrication. Residual [...]