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HomeAffiliationsUniversity of Ulm

Affiliations: University of Ulm

Synthesis, Reliability and Applications of Nanocrystalline CVD-grown Diamond and MicroDevice Fabrication

Wiora M., Brühne K., Flöter A.C., Gluche P., Fecht H-J., University of Ulm, DE
The correlation between the micro- and nanostructure of a material and its physical and chemical properties is the key issue in materials development. Considerable progress has been achieved recently by the development of new processing [...]

Levitation of a Charged Microdroplet

Schildknecht A., Hofer E.P., University of Ulm, DE
A new method for levitation of a charged microdroplet is presented. The feedback-control consists of high-speed camera, flatness based follow-up controller and high-voltage amplifier.

Miniaturized High Speed Visualization Setup for the Diagnostics of Dynamical Processes in Microsystems

Brugger H., Maier C., Hofer E.P., University of Ulm, DE
For the real time visualization of the dynamics of MEMS it is often inevitable to use high speed camera systems because of the optical enlargement. The micro diagnostic system MinVis, which consists of a miniaturized [...]

Simulation of a Diamond-Based Bistable Thermal Microswitch

Schmid P., Hernandez-Guillen F.J., Kohn E., University of Ulm, DE
A novel bistable layout for a thermally driven microswitch based on polycrystalline diamond has been developed and evaluated by simulations. The device is based on a double-anchored, free standing diamond beam, which buckles due to [...]

Microflows with Moving Boundaries: Experiment and Simulation

Maier C., Hofer E.P., University of Ulm, DE
Surface forces and capillary effects can play a dominant role in fluidic microsystems. Therefore it is crucial for simulations to use accurate numerical approaches [1]. Furthermore experimental data gained from such surface dominated systems can [...]

Impact of Microdrops on Solid Surfaces for DNA-Synthesis

Maier C., aus der Wiesche S., Hofer E.P., University of Ulm, DE
The miniaturization of chemical synthesis procedures and their integration in complex microfluidic systems is highly interesting both commercially and scientifically. Here, dosing of microdrops for activation or passivation with high accuracy on a substrate or [...]

Modeling of High-speed Diamond Microswitch

Schmid P., Adamschik M., Ertl S., Kohn E., University of Ulm, DE
CVD grown diamond is a new attractive MEMS material and has been used here to realize a microswitch with extreme properties. Still at present the technological development requires a fast turnaround of the design based [...]

Modeling Approach for CVD-Diamond Based Mechanical Structures

Schmid P., Adamschik M., Ertl S., Gluche P., Kohn E., University of Ulm, DE
In this study, mechanical structures based on polycrystalline diamond films grown on silicon substrate are investigated. In contrast to all-silicon MEMS, additional problems arise due to the unusual properties of diamond. These effects are investigated [...]

Dynamics in a Thermal Ink Jet: A Model for Identification and Simulation

Rembe C., aus der Wiesche S., Hofer E.P., University of Ulm, DE
In this paper a newly developed model for identification and simulation of dynamic phenomena in a thermal ink jet is presented. As a result of the modeling the calculation of the pressure propagation in the [...]

Dynamics in Microfluidic Systems with Microheaters

aus der Wiesche S., Rembe C., Maier C., Hofer E.P., University of Ulm, DE
The physics of nucleation, boiling, bubble growth and collapse in thermal microactuators will be presented. The boiling process exhibits an equivalence to a phase transition of second order and this leads, in contrast to classical [...]

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