Focussed ion beam etching of the interfacial region of lead zirconate titanate thin film after laser-release from sapphire fabrication substrate

, , , , , , , ,
Although many lead zirconate titanate (PZT) based MEMS have been demonstrated, the thermal incompatibility problems associated with in-situ fabrication of PZT films on the device substrate remain a major challenge. Process temperatures of 600 –700 [...]