TU Braunschweig – TechConnect Briefs

Piezoresistive effect in DLC Films and Silicon

Tibrewala A., Phataralaoha A., Peiner E., Bandorf R., Büttgenbach S., TU Braunschweig, DE

In this work piezoresistive effect in Diamond-like carbon (DLC) films and p-diffused strain gauges is compared for the first time. DLC films are already well known in optical coatings. Here it is integrated with silicon [...]

Rule Based Validation of Processing Sequences

Hansen U., Germer C., Büttgenbach S., Franke H-J, TU Braunschweig, DE

In conventional mechanical engineering the development of a product is influenced only little by the specific requirements of the fabrication processes. When looking at the domain of micro mechanical devices this circumstance is no longer [...]

Rule Based Validation of Processing Sequences

Hansen U., Germer C., Büttgenbach S., Franke H-J, TU Braunschweig, DE

In conventional mechanical engineering the development of a product is influenced only little by the specific requirements of the fabrication processes. When looking at the domain of micro mechanical devices this circumstance is no longer [...]