Georgia Institute of Technology – Page 5

Air Damping in an Ultra-High-Frequency Disk Resonator

Yap L.K., Yap L.Y., Yap L.K., Yap L.Y., Ye W., Georgia Institute of Technology, US

In this paper we investigate the air damping in a circular disk radially oscillating at 1GHz. First the compressibility effects of air between the disk and the substrate are studied. The pressure perturbation along the [...]

Electrohydrodynamic Interactions of an AFM Tip and a Biological Membrane

Fan T.H., Fedorov A.G., Georgia Institute of Technology, US

In biological applications, AFM imaging needs to be performed in the natural (aqueous) living environment of the cell in order to observe molecular level interactions and biochemical processes in-situ in the electrolyte solution and to [...]

Efficient 3-D Numerical Code “FastSlipStokes” for Drag Force Calculation Due to Slip Flow

Ding J., Ye W., Georgia Institute of Technology, US

Drag force calculation due to slip flows is important in predicting the performance of the microstructures with minimum feature size around 1 mm. In this paper, an efficient numerical approach to compute the drag force [...]

Simulation and Modeling of a Micro Pressure Sensor Array

Jin J., Zhou Z., Georgia Institute of Technology, US

In order to integrate MEM devices with CMOS circuits, compatibility of materials, micron scale mechanical structures, and the fabrication technology with CMOS is imperative. This paper describes the design of a micron scale pressure sensor [...]

Modeling of a Self-Retracting Fully-Compliant Bistable Micromechanism

Masters N., Howell L.L., Georgia Institute of Technology, US

The purpose of this paper is to demonstrate how a combination of models facilitated the development of a new class of small displacement fully-compliant bistable micromechanisms (Self-Retracting Fully-compliant Bistable Micromechanism, or SRFBM). Two different Pseudo-Rigid-Body [...]

Coupled-Energy-Domain Macromodeling of MEMS Devices

Casinovi G., Georgia Institute of Technology, US

This paper describes a systematic approach to the development of multi-energy-domain macromodels of MEMS devices. This approach is based on a particular form of the coupled algebraic-differential equations describing the dynamics of the device. All [...]

Multiple Solutions in Electrostatic MEMS

Pelesko J.A., Georgia Institute of Technology, US

The pull-in voltage instability is the principle phenomena limiting the design of nearly every electrostatically actuated MEMS device. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer [...]

Efficient Simulation of MEMS Using Element Stamps

Casinovi G., Georgia Institute of Technology, US

This paper describes an approach to MEMS simulation based on so-called element stamps, which are the building blocks of conventional circuit simulators. Stamps are derived from lumped-constant models of individual electromechanical devices, and built into [...]

Nonlocal Problems in MEMS Device Control

Pelesko J.A., Triolo A.A., Georgia Institute of Technology, US

Perhaps the most ubiquitous phenomena associated with electrostatically actuated MEMS devices is the "pull-in" voltage instability. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer a steady-state [...]