Carnegie Mellon University – Page 3

Table-Based Numerical Macromodeling for MEMS Devices

Wu J., Carley L.R., Carnegie Mellon University, US

In this paper, we present a table-based numerical macromodeling method in which a MEMS device is modeled by a set of numerical ordinary differential equations and model functions are represented by look-up tables of numerical [...]

Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives

Xie H., Erdman L., Jing Q., Fedder G.K., Carnegie Mellon University, US

This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis [...]

Layout Synthesis of CMOS MEMS Accelerometers

Gupta V., Mukherjee T., Carnegie Mellon University, US

An optimal layout synthesis methodology for CMOS MEMS accelerometers is presented. It consists of a parame-trized layout generator that optimizes design objectives while meeting functional specifications. The behavior of the device is estimated using lumped [...]

Top Down Design of MEMS

Fedder G.K., Carnegie Mellon University, US

A top-down design flow for suspended MEMS is described, starting with schematic capture of a design topology, followed by behavioral simulation, layout generation, parasitic extraction, and final verification. Support for this flow requires a MEMS [...]

Analytical Modeling of Cross-Axis Coupling in Micromechanical Springs

Iyer S., Zhou Y., Mukherjee T., Carnegie Mellon University, US

Analytical models to describe coupling between different directions of motion are derived using energy methods and verified for the U-spring, crab-leg spring and the serpentine spring. Finite element analyses (FEA) are done for a range [...]

Inductive Fault Analysis of a Microresonator

Jiang T., Kellon C., Blanton R.D., Carnegie Mellon University, US

We study the failure mechanisms of a microresonator. A MEMs process simulation tool is used to discover the full spectrum of defective structures caused by particulate contaminations introduced during manufacturing. Based on process simulation results, [...]

Intelligent Automatic Meshing of Multilayer CMOS Micromachined Structures for Finite Element Analysis

Lakdawala H., Baidya B., Mukherjee T., Fedder G.K., Carnegie Mellon University, US

In this paper, we describe an automatic technique for meshing multilayer CMOS micromachined structure for Finite Element Analysis (FEA) from device layout. The technique is based on a 3D canonical representation of the different CMOS [...]

Parameterized Electrostatic Gap Model for Structured Design of Microelectroelectrical Systems

Lu M.S., Fedder G.K., Carnegie Mellon University, US

VLSI system designers can begin their design process with a behavrioal description of a system, then proceed to physical design. MEMS designers typiclly begin with device design, this process is opten followed by several fabrication [...]

MEMS Component Extraction

Baidya B., Gupta S.K., Mukherjee T., Carnegie Mellon University, US

Surface micromachined structures are composed of atomic elements like anchors, beams and fingers, which can be further grouped into components like springs, comb drives and plates. Automatic recognition of these elements and com-ponents is crucial [...]

Hierarchical Representation and Simulation of Micromachined Inertial Sensors

Vandemeer J.E., Kranz M.S., Fedder G.K., Carnegie Mellon University, US

A circuit-level methodology for simulating micromachined inertial sensors based on a hierarchical representation of microelectromechanical systems (MEMS) is presented. In the NODAS methodology 2dal Design of Actuators and Sensors), microaccelerometers and microgyroscopes are designed as [...]