US – Page 463 – TechConnect Briefs

Techniques for Coupled Circuit and Micromechanical Simulation

Chen J., Kang S-M, University of Illinois at Urbana-Champaign, US

This paper details advanced simulation techniques for efficiently determining system behavior of integrated microsystems that contains both circuit elements and micromechanical ones. Techniques for building reduced-order dynamical models for coupled energy domain non-liner (both weakly [...]

Low Order Squeeze Film Model for Simulation of MEMS Devices

Vemuri S., Fedder G.K., Mukherjee T., Carnegie Mellon Universtiy, US

A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few microns is presented. Simulation results from this model are within 3% of those obtained from high-fidelity [...]

Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives

Xie H., Erdman L., Jing Q., Fedder G.K., Carnegie Mellon University, US

This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis [...]

Phase-Lead Compensator to Improve the Transient Performance of Comb Actuators

Chen Y., Shroff Y., Oldham W.G., University of California, US

The transient performance of electrostatic actuators is important in high-frequency switching operation of MEMS devices [1]. Optimization of the transient behavior of a simple actuator without introduction of controller network or modification of actuator shape [...]

Design of MEMS Tunable Capacitor all Metal Microstructure for RF Wireless Applications

Mohamed A., Elsimary H., Ismail M., Ohio State University, US

In this work a new design of a tunable capacitor based on microelectromechanical system (MEMS) technology is presented. The design of high Q- tunable capacitor has been accomplished through bulk micromachining process with all metal [...]

Layout Synthesis of CMOS MEMS Accelerometers

Gupta V., Mukherjee T., Carnegie Mellon University, US

An optimal layout synthesis methodology for CMOS MEMS accelerometers is presented. It consists of a parame-trized layout generator that optimizes design objectives while meeting functional specifications. The behavior of the device is estimated using lumped [...]

Macro-Modeling of Systems Including Free-Space Optical MEMS

Kurzweg T.P., Morris A.S., Uiversity of Pittsburgh, US

One barrier to the integration of MEMS devices into optical systems is the lack of a system-level CAD tool allowing the optimization of MOEMS designs simultaneously with embedding control electronics. Our work addresses this issue [...]

Towards Microelectrofluidic System (MEFS) Computing and Architecture

Dewey A., Fair R.B., Jopling J., Ding J., Zhang T., Cao F., Schreiner B., Pollack M., Duke University, US

This paper presents the rationale, design, and simulation of next-generation microelectro fluidic system computational architectures for the emerging field of bioinformatics. Current microelectro fluidic processors (e.g. biochips) have largely dedicated architectures supporting relatively specialized applications. [...]

Heterogeneous Thin Films of Martensitic Materials with Application to Large Strain Microactuators

Shu Y.C., California Institute of Technology, US

We propose a multiscale modeling to study the effective behavior of a heterogeneous thin film accounting in detail for the underlying microstructure, grain sizes and the film thickness. Motivated by the recent study of shape-memory [...]

Simulations for Optimized Piezoresistors

Mladenovic D., Vasileska D., Motorola, US

As a phenomenon, piezoresistive effect is well understood from the theoretical point of view. Experimental characterizations have also been done on a variety of uniformly doped samples. However, for modern LSI structures, with shallow diffused [...]