US – Page 442 – TechConnect Briefs

Simulation of Manufacturing Variations in a Z-axis CMOS-MEMS Gyroscope

Iyer S., Mukherjee T., Carnegie Mellon University, US

This paper uses MEMS circuit-level simulation to correlate gyro performance measures such as zero rate output (ZRO), linear acceleration sensitivity (Sa) and cross-axis sensitivity (Sca) to geometrical asymmetries. Elastic and electrostatic asymmetries in the gyroscope [...]

Dispersion Modeling in Microfluidic Channels for System-level Optimization

Baidya B., Mukherjee T., Hoburg J.F., Carnegie Mellon University, US

Chip-based microfluidic separation systems often use serpentine channels to achieve long separation lengths in minimal area. Such designs suffer from the ‘racetrack’ effect due to the bends in the microchannel. In addition, the skew produced [...]

Micromechanical Pierce Oscillator for Resonant Sensing Applications

Seshia A.A., Low W., Bhave S.A., Howe R.T., Montague S., University of California, US

We present the design techniques and experimental characterization of a Pierce oscillator circuit adapted for micromechanical elements with resonant frequencies lying between 100 and 300 kHz. Micromechanical double-ended tuning fork resonators serve as the crystal [...]

Coupled-Energy-Domain Macromodeling of MEMS Devices

Casinovi G., Georgia Institute of Technology, US

This paper describes a systematic approach to the development of multi-energy-domain macromodels of MEMS devices. This approach is based on a particular form of the coupled algebraic-differential equations describing the dynamics of the device. All [...]

Integrated Hierarchical Design of Microelectrofluidic Systems using SystemC

Zhang T., Chakrabarty K., Fair R.B., Cadence Design Systems, Inc., US

This paper describes the role of SystemC in developing an integrated modeling and simulatio environment for microelectrofluidic systems (MEFS). Based on the unique modeling and simulation needs for MEFS, we examine suitability of several existing [...]

Large-Deflection Beam Model for Schematic-Based Behavioral Simulation in NODAS

Jing Q., Mukherjee T., Fedder G.K., Carnegie Mellon University, US

MEMS design in NODAS is based on a geometrically intuitive schematic representation of MEMS using a small set of atomic elements (anchors, beams, plates and electrostatic gaps), each of which is associated with a geometrically [...]

Integrated Modeling of Optical MEMS Subsystems

Stoll R., Plowman T., Winick D., Morris A., Coventor, US

This paper presents top-down holistic design and verification of a MEMS-based 3-D optical switching subsystem utilizing an integrated CAD environment. The subsystem design takes place in a nodal simulation environment that includes models for fibers, [...]

Improving Trajectory Piecewise-Linear Approach to Nonlinear Model Order Reduction for Microm䁡chined Devices Using an Aggregated Projection Basis

Rewienski M., White J.K., Massachusetts Institute of Technology, US

In this paper we present an improved algorithm for nonlinear model order reduction (MOR) based on the trajectory piecewise-linear method proposed in [6] which, as shown before, provides an e ective and eÆcient strategy for [...]

Modeling, Simulation and Design of Piezoelectric Micro-Hydraulic Transducer Devices

Yaglioglu O., Su Y.H., Roberts D.C., Carretero J., Hagood N.W., Massachusetts Institute of Technology, US

This paper reports on modeling, simulation and design considerations for piezoelectric Micro-Hydraulic Transducer (MHT) systems, focusing on power generation applications. Since these devices are complex fluid and structural systems, comprehensive simulation tools are needed for [...]

Numerical Simulation of Droplet Shapes on Rough Surfaces

Patankar N.A., Chen Y., Northwestern University, US

It has been demonstrated that surface roughness causes superhydrophobicity. Our objective is to develop a numerical tool and study the relationship between the roughness characteristics and the apparent contact angle and motion of liquid drops [...]