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Tilt-angle Stabilization of Electrostatically Actuated Micromechanical Mirrors

Chen J.H., Weingar W., Azarov A., Giles R.C., Agere Systems, US

Recently proposed optical subsystems utilizing micro-electromechanical components are being developed for use in photonic crossconnects, optical add/drop multiplexers, and spectral equalizers. Common elements to these subsystems are electrostatically actuated micromechanical tilt mirrors that steer optical [...]

Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer

Xie H., Fedder G.K., Pan Z., Frey W., University of Florida, US

This paper reports a novel single structure, three-axis sensing accelerometer based on post-CMOS process. The resultant device incorporates both thin-film structures and bulk Si structures to achieve three-axis acceleration sensing without extra front-side lithography, or [...]

System Level Simulation of Mixed-signal Multi-domain Microsystems with Piecewise Linear Behavioral Models

Kurzweg T.P., Levitan S.P., Davare A.J., Kahrs M., Chiarulli D.M., University of Pittsburgh, US

The creation of simulation tools for mixed-signal, multi-domain (MSMD) systems is challenging because these systems span the physical domains of electronics, photonics, fluidics, and mechanics, as well as multiple orders of magnitude in both time [...]

Magnetic Diffusion in Nonlinear Micro-Media: A Modified Finite-Difference Time-Domain Approach

Cros F., Allen M.G., Lang J.H., Massachusetts Institute of Technology, US

As flux densities and frequencies are raised to increase the performance of magnetic micro-actuators, micro-motors/generators, and micro-inductors, eddy currents and magnetic saturation start to limit the performance of these devices. In this paper, we present [...]

MEMS Technologies for Communications

Nguyen C.T.-C., DARPA/MTO, US

Micromechanical (or umechanical) communication circuits fabricated via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching, and frequency generation, are described with the intent to miniaturize wireless transceivers. Possible MEMS-based receiver front-end architectures are [...]

Country: US

Tilt-angle Stabilization of Electrostatically Actuated Micromechanical Mirrors

Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer

System Level Simulation of Mixed-signal Multi-domain Microsystems with Piecewise Linear Behavioral Models

Magnetic Diffusion in Nonlinear Micro-Media: A Modified Finite-Difference Time-Domain Approach

MEMS Technologies for Communications

Numerical Simulations of Novel Constant-Charge Biasing Method for Capacitive RF MEMS Switch

Design Optimization of Micromachined High Aspect Ratio 3D On-Chip Solenoid Inductor

Changing the Paradigm for Compact Model Integration in Circuit Simulators Using Verilog-A

A Surface-Potential-Based Extrinsic Compact MOSFET Model

Compact Modling of High Frequency Phenomena for On-Chip Spiral Inductors