NL – Page 9 – TechConnect Briefs

Modelling of Integrated Peltier Elements

Wijngaards D.D.L., Cretu E., Kong S.H., Wolffenbuttel R.F., DIMES ITS/Et, NL

On-chip integration of Peltier devices creates a number of additional parasitics, compared to conventional Peltier devices. The most important are thermal conduction through the supporting membrane and contact resistance. Analytical analysis shows that each parasitic [...]

Analytical Modelling for Accelerometers with Electrically Tunable Sensitivity

Cretu E., Bartek M., Wolffenbuttel R.F., Delft University of Technology, NL

Results of the analysis and modelling of a pendulum type of accelerometer in an electrostatic field are presented. A common-mode voltage is used to yield an electrostatic positive feedback that amplifies the mechanical sensitivity. The [...]

Load-Deflection of a Low-Stress SiN-Membrane/Si-Frame Composite Diaphragm

Correia J.H., Bartek M., Wolffenbuttel R.F., Delft University of Technology, NL

Finite-Element-Methods (FEM) has been used to study the behavior of a non-planar composite diaphragm, which is to be used in a tunable Fabry-Perot-based silicon microinterferometer. The composite (Ag-mirrorAow-stress SiN membrane/Si-frame) diaphragm used exhibits: excellent flatness, [...]

Modeling and Validation of Flow-Structure Interactions in Passive Micro Valves

Oosterbroek R.E., Schlautmann S., Berenschot J.W., Lammerink T.S.J., van den Berg A., Elwenspoek M.C., University of TWente, NL

This paper reports the modeling of the stationary flow-structure interaction of different types of micro check valves. Mathematical indirect, domain coupled and decoupled, finite element models as well as analytical approximations are made. The obtained [...]