DE – Page 39 – TechConnect Briefs

Modeling of Electrostatic MEMS Components

Lorenz G., Neul R., Dickmann S., Robert Bosch GmbH, DE

This paper describes an analytical approach for the network-type modeling of pull-in comb drives based on a mathematical field description using conformal mapping methods. The model was coded in MAST R for the SABER R [...]

Laser Induced Surface Modification of Ceramic Substrates for Thermal and Electric Lines in Microsystems: Modeling Compared to Experiment

Gruhn H., Heidinger R., Rohde M., Rüdinger S., Schneider J., Zum Gahr K.-H., Forschungszentrum Karlsruhe, DE

Laser induced surface modification has been used to fabricate conducting paths in ceramic substrates. For the purpose of process simulation and prediction of process parameters a finite element model has been developed to simulate the [...]

Simulation Support for Silicon-Bulk Microsystems Demonstrated in an Inclination Sensor Development

Zielke D., GEMAC mbH, DE

The design and development are supported by many simulation tools nowadays. The specific use of technology modeling and FEM-simulation for silicon bulk micromachining is contents of the paper. For this, the whole procedure between the [...]

The Art of Modeling Coupled-Field Effects in Microdevices and Microsystems

Wachutka G., Münich University of Technology, DE

The rapid progress in microsystems technology is increasingly supported by MEMS-specific modeling methodologies and dedicated simulation tools. These do not only allow the visualization of fabrication processes and operational principles, but they also assist the [...]

Semianalytic Modelling of a Magnetic Levitated Disk with Nonuniform Polarization

Michael S., Scheinert G., Uhlman H., Technical University of Ilmenau, DE

A magnetic bearing for a high rotating electromagnetic drived disk with regard to future applications like the Laser-TV is modelled and designed. For modelling of the system consisting of permanent magnets and copper coils a [...]

Sensitivity Calculation Model Using the Finite-Difference Method

Mueller C., Scheinert G., Uhlmann H., Technical University of Ilmenau, DE

The paper describes an approach to general-purpose design sensitivity analysis for electromagnetic devices. Micro system technology often requires the assessment of manufacturing techniques or effects of tolerances. Emphasis is therefore put on the adaptability to [...]

Design and Modelling of Optical Microsystems – An Approach to a User-Friendly System Integration Technique

Wächter C., Schreiber P., Karthe W., Elbers J-P, Glingener C., Voges E., Krabe D., Dümcke R., Reichl H., Hagner G., Schröter S., Bartelt H., Stock E.A., Bauer G., Schäfer W., Sickinger H., Schwider J., Fraunhofer-Institut fur Angewandte Optikund Feinmechanik, DE

Optical microsystems usually are of a hybrid nature. They consist of optical components. i.e.micro-optical and or integrated-optical ones, and additionally they include at least mechanical and packaging components. Therefore, a complete design process has to [...]

Country: DE