DE – Page 13 – TechConnect Briefs

Customer-focused batch production via printing technology

Kain A., Mueller C., Reinecke H., University of Freiburg, DE

This paper presents a hot melt printing technology which provides a customer-focused batch production for circuit layers assembly, silicon surface structuring and 3-dimensional surface modification. By the forming properties of hot melt inks and in [...]

Stable colloidal dispersion of luminescing silicon nanoparticles for inkjet printing

Gupta A., Khalil A.S.G., Winterer M., Wiggers H., Universität Duisburg-Essen, DE

In this study, we synthesized Si-NPs with mean diameter about 4.2 nm in a microwave plasma reactor. In order to disperse these Si-NPs in organic solvent, the surface of freshly etched Si-NPs was modified with [...]

Ink-jet printed ZnO Nanoparticle Thin Films for Sensing Applications

Hartner S., Khalil A.S.G., Ali M., Winterer M., Wiggers H., University Duisburg-Essen, DE

Stable aqueous dispersions of ZnO NPs are successfully prepared with a new polymeric stabilizer. The dispersions are stable for at least 2 months without any observable sedimentation. The zeta potential and the size of the [...]

Design of a normally closed piezoelectric micro valve

Zähringer S., Menacher M., Kirchner P., Schwesinger N., Technische Universitaet Muenchen, DE

In a previously published paper a piezoelectric actuator using surface electrodes was investigated in a macro-microscopic approach. Bases on those results a normally closed piezoelectric micro valve was devoloped. Therefore the electrode structures were minimized [...]

Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy

Sulzbach T., Engl W., Maier R., Nanoworld Services GmbH, DE

Cantilever arrays probes with self-sensing and self-actuating cantilevers and integrated sharp silicon tips for parallel surface scanning were realized. Each cantilever is equipped with a piezoresistive deflection sensor and a thermal bimorph actuator enabling an [...]

Preparation of functional PZT films on 6” and 8” silicon wafers by high rate sputtering

Dudde R., Kaden D., Quenzer H.-J., Wagner B., Fraunhofer ISIT, DE

Crack and void free polycrystalline PZT films in the range of 2 µm to 6 µm have been successfully deposited on silicon wafers using a novel high rate gas flow sputtering process. The development of [...]

Investigation of Stress in AlN Thin Films for Piezoelectric MEMS

Sah R.E., Kirste L., Baeumler M., Hiesinger P., Cimalla V., Lebedev V., Baumann H., Fraunhofer Institute for Applied Solid State Physics, DE

Wurtzite type AlN thin films have recently become of great interest in microelectromechanical system (MEMS) and nanoelectromechanical system (NEMS) for sensing applications such as chemical and biological sensing, electrometry, and scanning probe techniques. As-grown films [...]

Gentle Micropump based on Microelectromagnetic Actuator

Al-Halhouli A.T., Waldschik A., Kilani M.I., Büttgenbach S., Technische Universität Braunschweig, DE

This work presents the fabrication and development of a new multifunction micropump based on integrated electromagnetic microactuator. The novel design consists of a fluidic chip, two microfabricated polymer magnets and chip cover. These components form [...]

Investigation on correlation between cold/hot weld line mechanical properties and micro injection molding processing parameters

Xie L., Zhu D., Ziegmann G., Steuernagel L., Technology University of Clausthal, DE

Micro injection molding has been attracting more and more market attentions, due to realizing the large scale cost effective production of Micro Electronic Mechanic System (MEMS) components. However, there are some defects which cannot be [...]

Measurement of DPN-Ink Viscosity using an AFM Cantilever

Biswas S., Hirtz M., Lenhert S., Fuchs H., Karlsruhe Institute of Technology, DE

The Dip-Pen Nanolithography (DPN) process uses a chemically coated scanning probe tip (the “pen”) to directly deposit a material (“ink”) with nanometer precision onto a substrate. Several experimental parameters have been observed to influence the [...]