3D Nanostructured Silicon Relying on Hard Mask Engineering for High Temperature Annealing (HME-HTA) Processes for Electronic Devices

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Annealing silicon at high temperatures in hydrogen ambiance has been reported to induce surface diffusion of silicon; in these conditions, adapted 2D arrays of trenches etched in Bulk Si are transformed into buried cavities creating [...]

Surface Nanostructuration: from coatings to MEMS fabrication

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The fabrication of surfaces and films with controlled nanometer features is currently an active area of research. The design of complex nanoarchitectures with novel physical properties has potential applications in many existing and emerging fields [...]