Papers:
Coupled Multiphysics and Chemistry Simulations of PCR Microreactors with Active Control
High-fidelity simulation tools that couple fluid flow, heat transfer and chemistry of PCR microreactors have been applied to different microreactor designs. The tools are coupled to a controller software for thermal control of the virtual [...]
Coupled System-Level and Physical-Level Simulation
Software tools for Mixed-Level Coupled Simulations have been developed. The system-level simulation uses the circuit theory approach, where each element of the system is modeled either through mathematical equation, or through coupling with physical-level 3D [...]
A Data Model for the Representation of Fabrication Dependencies Concerning Micromechanical Devices
Conventionally the design of a product is conducted paying only little attention to the subsequent manufacturing. Regarding micromechanical devices this is not practicable, since the design choices taken are highly dependent on the technology used [...]
Convergence and Speed Issues in Analog HDL Model Formulation for MEMS
Behavioral simulation using high-level hardware description languages (HDLs) is becoming increasingly relevant for mixed-domain MEMS simulation. In this paper three issues which impact the convergence and simulation time in MEMS behavioral simulations are addressed. First, [...]
A 3D Geometry Modeler for the SUMMiT V MEMS Designer
This paper will describe the SUMMiT V 3D Modeler; a 3D geometric modeler based on Sandia National Laboratories new five-level process for manufacturing microelectromechanical systems (MEMS). The modeler simulates the SUMMiT V process, a baseline [...]
Fail Pattern Classification and Analysis System of Memory Fail Bit Maps
In order to determine problematic wafer processing steps rapidly during memory production, the system that classifies failure patterns from memory fail bit maps (FBMs) and estimates the cause of failure is proposed. The system mainly [...]
Modeling of Electromagnetic Fields in High Speed Electronic Interconnects Using a Least Squares FD-TD Algorithm
A new Finite-Surface Time-Domain (FS-TD) numerical method is presented which is a generalization of the classical Finite-Difference Time-Domain (FD-TD) method of Yee. The method is divergence/charge preserving on arbitrary grids. It reverts to the standard [...]
A 2D Visualization Tool for SUMMiT V Designs
This paper describes the 2D Process Visualizer, a CAD tool that enables a SUMMiT (Sandia Ultra-Planar Multilevel MEMS Technology) MEMS designer to visualize the results of applying the process sequence to a mask set by [...]
RESCUER – the New and Effective Tool for Automatic Models Reduction – Application for Electro-Thermal Problems
This paper presents some methods of thermal model reduction and translation into hardware description languages or other ones. The very effective model reduction is achieved owing to the application of higher order approximation and joint [...]
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4