Papers:
Wafer level integration of epitaxial piezoelectric thin films for novel NEMS, MEMS and MOEMS applications
It is well known that Pulsed Laser Deposition (PLD) is a very flexible and versatile technique allowing fast optimization of new and complex material thin films. The unique features of PLD allow for the integration [...]
Design considerations: From Micro-Opto-Mechanical Pressure Sensor (MOMPS) to Micro-Opto-Mechanical Microphones (MOMM)
Haouari R., Jansens R., Rochus V., Figeys B., Rottenberg X., Imec (Belgium) ; KU Leuven (Belgium), BE
With a trend towards a plethora of ‘smart’ devices, the MEMS microphone sector has maintained an exponential growth in recent years. For many applications microphones need to survive harsh environments or be bio-compatible. Micro-Opto-Mechanical-Pressure Sensor [...]
Piezoelectric actuators, next driver for MEMS market?
Over the past three decades, huge progresses have been made in MEMS technologies. Hundreds millions of MEMS, principally: accelerometers, gyroscopes and microphones, are commercialized yearly. This should continue to increase with upcoming new applications related [...]
QUARTZ MEMS OSCILLATORS FOR HIGH-PERFORMANCE NAVIGATION AND WIRELESS COMMUNICATION SYSTEMS
Quartz MEMS resonators are attractive for use in oscillators for stable frequency control applications in navigation and wireless communication systems by virtue of their reduced cost, size, weight, and power (CSWaP), combined with the potential [...]
MEMS Inertial Sensors for Cyber-Physical Systems: Trustworthy Sensing, Secure Communication, Data Fusion and Information Control
This paper reports the experimental results for the inertial measurement units (IMUs). Consistent models are found. The documented findings and models can be used in the descriptive, predictive and prescriptive analyses. Our findings are substantiated [...]
A new humidity sensor based on the effect of water content on a capacitive MEMS oscillator’s thermo-electrical characteristics
Accurate humidity measurement is essential in commercial and industrial applications such as HVAC systems and microelectronics manufacturing. Typical humidity sensors suffer from degradation over time, consume a relatively high amount of power, and have limited [...]
High Sensitivity MEMS Pressure Sensor
Summary: ISU researchers have developed a high-sensitivity microelectromechanical system (MEMS), graphene-based pressure sensor that outperforms any existing MEMS-based small footprint pressure sensor. Description: ISU researchers have developed a microelectromechanical system (MEMS) graphene-based pressure sensor realized [...]
A New Pressure Threshold Sensor Based on Nonlinear MEMS Oscillator
Pressure sensing is one of the earliest applications of Micro-Electro-Mechanical-Systems MEMS. Changing the pressure sensing element (such as capacitive and optical) size to the microscale has created opportunities to reduce power consumption and production costs [...]
Modeling and Simulation on Crossroad-Type Graphene-Resonator Accelerometer
Accelerometers have multiple applications in industry and science, and can be used as sensors in a wide variety of devices. Highly sensitive accelerometers are components of inertial navigation systems for both aircraft and missiles, as [...]
Multi-cantilever array sensor system with MOEMS read-out
Cantilever beams-based sensor systems become a sensor family applicable in several high-end technology research areas. The outstanding sensitivity and phenomenon selectivity of such systems profits from functionalization technique available for cantilever beams surface. High selectivity [...]
Computational Analysis of Electrical Stimulation Devices to Promote Wound Healing
Anand A., Liu K., Sukhotskiy V., Verma A., Fournier J., Gellman G., Bacon W., Furlani E.P., University at Buffalo, Garwood Medical Devices, LLC, US
The treatment of wounds is a fundamental and major challenge in health care. Chronic wounds (e.g. diabetic) are particularly problematic and pervasive, afflicting approximately 6 million patients in the US alone at an annual cost [...]
The development of acoustic levitation for time resolved protein crystallography experiments at XFELS
Docker P., Morris R., Newton M., Kay J., Beale J., Axford D., Orville A., Stuart D., Diamond light Source, UK
This body of work is building on the systems described in a recent publication by Tsujino and Tomizaki 1. They describe the application of acoustic levitation to support protein crystals mounting for X-ray diffraction experiments [...]
An All-in-One Nanomechanical Bio-nanofluidic System for Possible Applications as Sensor and Actuator in Precise Drug Delivery
The paper presents the physical design and mathematical formulation of a bio-nanofluidic device for possible applications in nanoengineering in general and bio-nanoengineering in particular such as in precise drug delivery as sensors and actuators. The [...]
The Development of an Optofluidic Evanescent Field Sample Trapping and Loading Solution for Time Resolved Protein Crystallography Experiments
Diaz A.J., Docker P., Sparkes M.R., Kay J., Stuart D., Beale D. Axford J., ONeil W., Cordovez B., Diamond light Source, UK
X-ray crystallography is the leading technique for determining the atomic structure of biological molecules. The developers of this technique have maintained this position by continuously pushing the hardware and software boundaries such that data-collection from [...]
A New Concept for Humidity Sensing Using Curved Micro-beams
There are number of common humidity sensing methods in MEMS. They include capacitive, resistive, and thermal methods. Among these methods, capacitive sensing is considered the most common in MEMS. In this method, changes of a [...]
An investigation into methodologies for the modification of contact angle for MX crystallography
Burton C., Prince M., Topham P., Docker D. Axford P., Orville G. Evans A., Kay J., Stuart D., Aston University, UK
This paper describes a detailed investigation into a range of surface modifications for manipulating the hydrophobicity of X-ray compatible materials for the application of surface microfluidics. With traditional microfluidics, as the scale of a fluid [...]
Modeling and simulation of organic MEM relay for estimating the coefficient of thermal expansion of PEDOT:PSS
PEDOT:PSS is becoming a popular transparent electrode material for organic electronic and optoelectronic devices, replacing the more commonly used Indium Tin Oxide (ITO). PEDOT: PSS has good conductivity, transparency, superior electrical and thermal stability and [...]
Learning MEMS Design, Simulation and Fabrication Through 3-D Printing
This paper presents a cost-effective learning tool for modeling and simulating the microfabrication process and design aspects of MEMS devices using three-dimensional (3-D) printing. This approach was developed to provide engineering educators a more affordable [...]
Journal: TechConnect Briefs
Volume: 4, Informatics, Electronics and Microsystems: TechConnect Briefs 2017
Published: May 14, 2017
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 978-0-9988782-1-8