Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme

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This work deals with the stability of charge-controlled electrostatic actuators. First, a general proof is presented showing that for any electrostatic actuator, the stability range under charge-control is always larger than the stability range under voltage-control. Second, a novel numerical scheme for analyzing the stability and extracting the charge Pull-In parameters of charge-controlled actuators is proposed. Third, a novel strategy for further extending the travel-range of charge-controlled actuators is suggested.

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Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
Published: February 23, 2003
Pages: 436 - 439
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-1-7