Papers – Page 48 – TechConnect Briefs

Measuring the layer thickness of MEMS using torsional resonance

Andrews N.D., Clark J.V., Purdue University, US

In this work we propose a method to measure the structural layer thickness of MEMS using torsional resonance. The thickness of structures often has measurable influences on the mechanical, thermal, and electrical behaviors. Measurement of [...]

Fetal Movement Detection Based on MEMS Accelerometer

Minjie L., Yongkang T., Yunfeng L., Song Y., Jingxin D., Tsinghua University, CN

Fetal movement is a significant indication of fetal well-being. Standard clinical fetal monitoring technologies include ultrasound imaging and cardiotocography. Both have limited prognostic value and require many health resources. We have recently developed a low-cost, [...]

Direct-Write Microfabrication for Enhancement of Functionality of Optical Fiber Devices

Alemohammad H.R., Foroozmehr E., Cotten B., Toyserkani E., University of Waterloo, CA

The improvement of the functionality of optical fiber devices has always been a research topic. In this regard, coating of optical fibers with metal thin films has been considered as an effective approach. We report [...]

Measuring System Mass and Density of MEMS by Electronic Probing

Chigullapalli A., Purdue University, US

In this paper we propose a method to measure the system mass and material density of a common type of micro electromechanical systems (MEMS). Measurement can be done on- or off-chip.To examine the feasibility of [...]

Design of a nano-mechanical beam based memory element

Sahoo H.K., Uppala A., Anjur R., University of Pennsylvania, US

A cantilever beam based memory element is proposed which can trap static charge on a metal plate on the beam. The charge is tunneled to the metal plate from an electrode separated from it by [...]

Soft X-Ray Lithography for High-Aspect Ratio Sub-Micrometer Structures

Goettert J., Lemke S., Rudolph I., Seliger T., Loechel B., Louisiana State University, US

Combining soft x-ray lithography with SiN mask membrane and newly developed high contrast negative resist mr-X (micro resist technology GmbH, Berlin, Germany) enables the cost-effective patterning of sub-micrometer high aspect ratio structures. This work builds [...]

Micro Patterning of Organic Solvents on OLED Device Using EHD Inkjet Technology

Lee S-H., Nguyen X.H., Jo W., Ko H.S., Sungkyunkwan University, KR

Although there are many modes of the ejection mechanism from the EHD nozzle [2], a cone-jet mode, a pulse-jet mode and a micro-dripping mode have been analyzed by capturing the jetting phenomena using organic solvents [...]

High accuracy dual side overlay with wet anisotropic etching for HAR MEMS

van Zeijl H.W., Best K., Sarro P.M., Delft University of Technology, NL

Through wafer etching of silicon using anisotropic wet chemical etch ants like KOH is a key process in the fabrication of many types of MEMS devices. In this work, a dual side 2 mask process [...]

Optimised Piezoelectric PZT Thin Film Production on 8” Silicon Wafers for Micromechanical Applications

Kaden D., Gu-Stoppel S., Quenzer H.-J., Kaltenbacher D., Wagner B., Dudde R., Fraunhofer Inst. Silicon Technology, DE

Piezoelectric materials are of great interest for powerful actuation in MEMS devices. Due to its large electromechanical coupling coefficient Lead Zirconate Titanate (PZT) is one of the most favourable materials for realisation of fast and [...]

A Novel Pneumatically Driven SU-8 Microvalve for High Speed Gas Chromatographic Applications

Nubile A., Poggi A., Cozzani E., Elmi I., Zampolli S., Messina M., Cardinali G.C., Mancarella F., Belluce M., CNR, IT

Microvalves are basic components of microfluidic systems and MEMS technology has provided an opportunity for microvalves to be packaged onto a board with integrated microfluidic channels. For the successful miniaturization of integrated fluidic devices, it [...]