TechConnect Proceedings Papers
Displacement Detection using Quantum Mechanical Electron Tunneling in Micro and Nano-electro-mechanical Systems
Micro-electro-mechanical systems (MEMS) and, more recently, nanoelectromechanical systems (NEMS) are emerging as candidates for a number of important technological applications — such as ultra-fast actuators, sensors, and high frequency signal processing components. Experimentally, they are [...]