Papers – Page 35 – TechConnect Briefs

A New Method of Excluding The External Acceleration’s Effect in a Micromachined Magnetometer for Navigation Systems

Cho J-M, Kim K.S., An S.D., Park H.J., Hahm G., Samsung Electromechanics Co., LTD., KP

A new type of magnetometer-accelerometer is developed with a silicon micromachining. The operation principle of the sensor is based on the well known Lorentz force caused by the interaction of a current and an external [...]

Mechanical Damping due to Interface Motion in Micro-Resonators

Pawaskar D.N., Phillips R., California Institute of Technology, US

Mechanical damping strongly influences the sensitivity and resolution of nano-sensors and actuators. In this paper, we have investigated one of the key intrinsic mechanisms responsible for dissipation of vibrational energy in beams composed of a [...]

Modeling and Optimal Design of High Sensitivity Piezoresistive Microcantilevers for Biosensing Applications

Yang M., Zhang X., Ozkan C.S., University of California Riverside, US

We discuss the mechanical design and optimization of piezoresistive microcantilevers for use in detecting changes in surface stress upon analyte-receptor binding. Conventional microcantilevers are used along with an optical detection system in many commercially available [...]

A Novel Structure for PZT-Based Piezoelectric Microphone

Zhao H.J., Ren T.L., Liu J.S., Liu L.T., Liu J.S., Liu L.T., Li Z.J., Liu J.S., Liu L.T., Tsinghua University, CN

Microphone is one of the most challenging and developing areas and markets in the field of microsensor technology. Piezoelectric microphones have the advantages of simple fabrication process and easy to be integrated into semiconductor devices [...]

Analysis of Temperature Effect on Diaphragm Resonant Sensors

Faris W., Virginia Polytechnic and State Univeristy, US

Resonant senosrs and microsensors are one of the most common used sensors in industry. The applications ranges from fuid, pressure to chemical sensing. Temperature effect on the performance of such devices is of importance to [...]

The Analysis of the Influence of the Auxiliary Components on FBAR Response

Shing T-K, Tai C.H., Lee Y.D., Tien C.C., ITRI, TW

In recent years we have witnessed the explosive growth of wireless communication services. The future trend of wireless products is towards integration, size and cost reduction. With MEMS technologies, the thin film bulk acoustic wave [...]

Modeling and Simulation of A Surface Micromachined Triaxial Accelerometer

Jiang L., Carr W.N., New Jersey Institute of Technology, US

We present the modeling and simulation results in designing a surface micromachined, capacitive triaxial accelerometer. Electrical FEA simulations calculate the nominal values of the sensing capacitors and compared with parallel-plate analytical model. The mechanical static [...]

Development of a Resonant Magnetometer

Izham Z., Ward M.C.L., Brunson K.M., Stevens P.C., Microsystems Mechanical Engineering, UK

A new design and analysis of a resonant magnetometer is presented. Preliminary analysis shows a sensitivity of 3.9mV/microT. BESOI manufacturing techniques promises easy incorporation to present gyroscope and accelerometer designs promising a complete navigational control [...]

Design of Performance-Enhanced Fabry-Perot Micro-Cavity Structure With a Novel Single Deeply Corrugated Diaphragm

Wang W.J., Lin R.J., Guo D.G., Nanyang Technological University, SG

The silicon micromachining technique has been successfully applied to the fabrication of miniature Fabry-Perot sensors. This kind of sensor detects changes in optical path length induced by either a change in the refractive index or [...]

Design and Simulation of the GaAs Micromechanical Thermal Converter for Microwave Transmitted Power Sensor

Jakovenko J., Husak M., Burian E., Lalinsky T., Czech Technical University, CZ

In this project we discuss the thermomechanical simulations performed in the aim of optimising the GaAs based Micromechanical Thermal Converter that creates heart of Microwave Transmitted power sensor. Conception of the absorbed power measurement is [...]