Papers – Page 25 – TechConnect Briefs

Residual Stress Characterization in MEMS Microbridges using Micro-Raman Spectroscopy

Starman_Jr. L.A., Ochoa E.M., Lott J.A., Amer M.S., Cowan W.D., Busbee J.D., Air Force Institute of Technology, US

We characterize and measure the pre-released residual stress levels in polysilicon Micro-Electro-Mechanical Systems (MEMS) microbridges using micro-Raman spectroscopy. Raman spectroscopy is nondestructive, fast, and provides the potential for in situ stress monitoring during fabrication. Residual [...]

RF Measurement Techniques for Micro-Cantilever Characterization and Application

Wang C-H, Weber R.J., Iowa State University, US

The reflection coefficient (S11) of a one-port device is most sensitive to its input impedance if a matched condition is obtained. This implies two methods to measure the deflection-induced impedance change for a 1-port device [...]

Simulation and Modeling of a Micro Pressure Sensor Array

Jin J., Zhou Z., Georgia Institute of Technology, US

In order to integrate MEM devices with CMOS circuits, compatibility of materials, micron scale mechanical structures, and the fabrication technology with CMOS is imperative. This paper describes the design of a micron scale pressure sensor [...]

Modeling of a Self-Retracting Fully-Compliant Bistable Micromechanism

Masters N., Howell L.L., Georgia Institute of Technology, US

The purpose of this paper is to demonstrate how a combination of models facilitated the development of a new class of small displacement fully-compliant bistable micromechanisms (Self-Retracting Fully-compliant Bistable Micromechanism, or SRFBM). Two different Pseudo-Rigid-Body [...]

Analytical and FEM Simulation Pull-in Study on Deformable Electrostatic Micro Actuators

Cheng J., Zhe J., Wu X., Farmer K.R., Modi V., Frechette L., Columbia University, US

In this paper, we employed an easy general theory [1, 2] over FEM simulation to carry out the pull in analysis of cantilever beam, fixed-fixed beam and circular membrane actuators and compare the results with [...]

Concept of an Intelligent Microsystem Structure for Communication with Real Surrounding Space

Husak M., Jakovenko J., Czech Technical University, CZ

In the paper, concept of intelligent microsystem structure is presented. This concept is applicable in general surrounding environment. Concrete model of an intelligent temperature microsystem for control purposes is designed. Microsystem function has been verified [...]

Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications

Loughlin J.P., Fettig R.K., Moseley S.H., Kutyrev A.S., Mott D.B., NASA/Goddard Space Flight Center, US

Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5mm silicon nitride micro-shutter for use in a space-based Multi-object Spectrometer (MOS). The micro-shutter uses a torsion hinge to go [...]

Analytical Pull-in Study on Non-Deformable Electrostatic Micro Actuators

Zhe J., Wu X., Cheng J., Wang J., Farmer K.R., Frechette L., Modi V., Columbia University, US

A general theory and method was presented and employed to analyze the static behaviors of non-deformable electrostatic actuator systems with various electrode shapes. This method utilizes capacitance-based generalized equations and provides an easy and time [...]

Nonlinear Micromachined Flexure for Stiction Reduction

Shim D-H, Cho J-W, Samsung Advanced Institute of Technology, KR

This paper reports the nonlinear micromachined flexure to reduce the stiction in MicroElectroMechanical Systems (MEMS). Good electrical contacts are essential in the applications like MEMS switches or relays. In this case high contact forces are [...]

Simulation Based Design of O2 MEMS Sensor

Andjelic Z., Krippner P., Vogel A., ABB Corporate Research Center, DE

The paper presents the methodology for the Simulation Based Design (SBD) of MEMS sensors influenced by mechanical and electromagnetic phenomena. The complexity of the problems mostly asks for both the efficient 3D numerical technologies and [...]