Modeling & Simulation of Microsystems – Page 71

Simulating 3-Dimensional Deep X-ray Lithography Using the CXrL Toolset

Aigeldinger G., Craft B., Menz W., Louisiana State University, US

Experimental evaluation of the dose distribution resulting from 3-dimensional deep x-ray lithography is often impractical. Computer modeling is a valuable tool for simulating this system. Preliminary simulations of 3-dimensional, deep, xray lithography exposures have been [...]

Layout Verification Tools for MEMS Physical Design

Hahn K., Brück R., Reusch B., Universitat Dortmund, DE

The impact of technoloDy related issues in microsystem physica] design is of hiah relevance due to the fact that mask layout and process configuration are strongly interdependant. Performing physical design in this area therefore means [...]

Computer Aided Modeling of Static and Dynamic Transfer Characteristics

Anton M., Bechtold S., Nüssen O., Laur R., University of Bremen, DE

When creating mathematical models of microsystem components or microelectronic devices, analytical and experimental modeling concepts can be distinguished. Analytical modeling, often performed on process or device level, can only be applied if the equations and [...]

SEGS: On-line WWW Etch Simulator

Li G., Hubbard T., Antonsson E.K., Daltech-Dalhousie University, CA

This paper presents an interactive on-line wet etch simulator (SEGS) which predicts the etched shape as a function of time for arbitrary isotropic or anisotropic etchants and any initial mask shape. Using any Javaenabled web [...]

Systematic Design of Electrothermomechanical Microactuators using Topology Optimization

Sigmund O., Technical University of Denmark, DK

Design methods for MicroElectroMechanical Svstems (MEMS) have, until now, typically been based on intuition, experience and triai and error approaches. A method which may be used to design mechanical and electromechanical coupling parts of MEMS [...]

Design Optimization of Microsystems

Eggert H., Guth H., Jakob W., Meinzer S., Sieber I., Süß W., Institut fur Angewandte Informatik, DE

At systems level, however, the extreme complexity of FEM models (many network nodes, long computer times) requires the use of models determined analytically. As the complexity of the search space of such analytical models becomes [...]

Software Systems and Tools

Dispersive Media in FDTD-Comparison of Recursive Convolution and Auxiliary Differential Equation Methods

Körner T.O., Fichtner W., ETH-EPFL, CH

A new, efficient algorithm for modelling dispersive media in Finite Difference Time Domain (FDTD) methods is presented. It is based on the Auxiliary Differential Equation (ADE) formulation. Accuracy and efficiency are compared to other ADE [...]

A 3D Mesh Generation Method for the Simulation of Semiconductor Processes and Devices

Lilja K., Moroz V., Wake D., Technology Modeling Associates, Inc., US

We present an extended quadtree-octree mesh generation method which is well suited for semiconductor process and device simulation. The method can handle complicated geometries and moving boundaries. In order to describe boundaries and trace boundary [...]

MEMS Design Optimization Using Coupled FEM and Electrical Circuit Simulation

Krassow H., Zabala M., Götz A., Cané C., Centro Nacional de Microelectronica, ES

The FEM (Finite Element Method) package ANSYS includin`, the CFD (Computational Fluid Dynamics) module FLOTRAN was coupled with the electrical network simulator HSPICE for the comprehensive design of microsystems. The coupling permits the simultaneous optimization [...]