Topic: Modeling & Simulation of Microsystems
Discrete Impurity Effects in Silicon Quantom Dots
We have developed efficient self-consistent 3D Schrodinger-Poisson solver to model the energy level spectrum in silicon quantum dots. We find that the energy level spectrum in the dot can be easily tuned by varying the [...]
A Mathematical Model for Process Control in Laser Chemical Vapor Deposition
Laser chemical vapor deposition is a free form technique capable of producing high aspect ratio microstructures of arbitrary shape. The process does not yet have a high resolution required for microfabrication. For this study, we [...]
Closed-Loop, Neural Network Controlled Accelerometer Design
In this paper, a closed-loop, smart transducer design is proposed, based on artificial neural network (ANN) techniques. The design aims to improve the performance of open-loop, off-the-shelf capacitive acceleration sensors and increase their robustness to [...]
Nonlocal Problems in MEMS Device Control
Perhaps the most ubiquitous phenomena associated with electrostatically actuated MEMS devices is the "pull-in" voltage instability. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer a steady-state [...]
A Novel Approach to Simulate the Potential at the Center Axis of Poisson’s Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes
A novel and practical method is developed to resolve the three dimensional Poisson’s and Laplace’s equation at the center axis in cylindrical coordinates. The method employs the rectangular xyz co-ordinates to solve the potential f [...]
Finite Element Based Electrostatic-Structural Coupled Analysis with Automated Mesh Morphing
A co-simulation tool based on finite element principles has been developed to solve coupled electrostatic-structural problems. An automated mesh morphing algorithm has been employed to update the field mesh after structural deformation. The co-simulation tool [...]
Co-simulation and Optimization Micro Electro Mechanical Systems by Using Method of Theoretical Investigation
Before elaboration and designing of micro electromechanical systems (MEMS) it is very important to carry out an appropriate computer modeling for analyzing and optimizing. To describe adequately the physical phenomenon talking place in MEMS it [...]
Reduced-Order Models of Stress-Stiffened MEMS Structures
We present a process for generating reduced-order models for stress-stiffened MEMS structures. The models are created using the established CHURN process, which uses non-linear, analytic, energy functions to describe the state of each conservative quasi-static [...]
Mathematical Analysis of Electrostatically Actuated MEMS Devices
We perform a rigorous mathematical analysis of a simple membrane based model of an electrostatiacallyh actuated MEMS device. Using both analytical and numerical techniques, we prove the existence of a fold in the solution space [...]