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HomeTopicsModeling & Simulation of Microsystems

Topic: Modeling & Simulation of Microsystems

Finite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS)

Ostergaard D.F., Gyimesi M., ANSYS, Inc., US
The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program.

Software Tools, CAD Systems

Numerical Simulations to Predict the Functionality of Optical Devices

Scherer K.P., Eggert H., Guth H., Sieber I., Stiller P., Forschungszentrum Karlsruhe, DE
At the Institute of Microstructures in the Research Center of Karlsruhe (FZK) optical devices are developed in micro-structure technologies [1]. Because of the miniaturized dimensions of the optical components, a very high accuracy must be [...]

Simulation of Aluminum Micro-mirrors for Space Applications at Cryogenic Temperatures

Kuhn J.L., Dutta S.B., Greenhouse M.A., Mott D.B., NASA/Goddard Space Flight Center, US
Closed form and finite element models are developed to predict the device response of aluminum electrostatic torsion micro-mirrors fabricated on silicon substrate for space applications at operating temperatures of 30K. Initially, closed form expressions for [...]

Micromirror Array Design and Simulation

Huja M., Husak M., Czech Technical University in Prague, CS
The main objective of the research described is to design optimal principle of micromirror array and its manufacturing technology with maximum penentration of the reflected/non-reflected part of micromirror array using standard, easily available and cheap [...]

Modeling and Simulation of a Permanent Magnet Array in Elliptical Configurations

Lee S.J., Jiles D.C., Iowa State University, US
Permanent magnet arrays have advantages for magnetic field generation over the traditional current based magnetic flux sources, such as electromagnets, in that they do not require a power supply and cooling system. Magnetic flux density [...]

Modeling and Design of a Micromechanical Phase-Shifting Gate Optical Modulator

Que L., Witjaksono G., Gianchandani Y.B., University of Wisconsin, US
This paper reports the modeling and design of a micromechanical optical modulator with a phase-shifting gate that utilizes optical interference effects to modulate light. The gate is opened or closed by microactuators integrated on the [...]

Analytic and Raytrace Modeling of a Miniaturized Infrared Spectrometer Module

Keränena K., Blomberg M., Tenhunena J., Kariojac P., VTT Electronics, FI
When designing the construction of an optoelectronic module, the modeling of the system allows for the possibility to optimize geometries, materials and components in order to achieve optimal performance and cost effectiveness for the final [...]

Optical Propagation Methodologies for Optical MEM Systems

Kurzweg T.P., Levitan S.P., Martinez J.A., Marchand P.J., Shomsky M.T., Chiarulli D.M., University of Pittsburgh, US
In this paper, we examine optical propagation techniques for modeling and simulating optical MEM systems. We determine an appropriate technique through studying two criteria: the requirements established by the physical properties of these systems and [...]

Applications: Electromagnetics, Optics, Imaging

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