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HomeTopicsMEMS & NEMS Devices, Modeling & Applications

Topic: MEMS & NEMS Devices, Modeling & Applications

Modeling and Simulation of THUNDER Actuators Using ANSYS Finite Element Analysis

Kennedy C., Usher T., Mulling J., Kingon A., Think Peak, Inc., DE
The use of a quarter-symmetry three-dimensional finite element analysis model in predicting the behavior of the laminated piezoceramic material device known as THUNDER actuators is investigated. The analyses simulating the fabrication process and subsequ

Effects of Slider-Driven Piezo-Microactuator Placements and Profiles on HGA Sway Mode

Yang J.P., Chen S.X., National University of Singapore, US
With areal recording density of hard disk drives (HDD) historically growing at an average of 60% per year, it is becoming increasingly more difficult to maintain the precise positioning required of the ever-smaller GMR heads [...]

Development of Patterned SMA Strips as Self-Heating Resistors

Chen J., Cheng X.L., Cai B.C., Xu D., Wang L., Cheng X.L., Shanghai Jiao Tong University, SG
A way to develop the pattern of shape memory alloys (SMA) titanium-nickel (TiNi) strips for improving the actuation performance of membrane microactuator is described in this paper. The patterned SMA strips serve not only as [...]

Electromechanical and Microwave S-parameter Properties of a Wide Tuning Range MEMS Tunable Capacitor

Chen J., Zou J., Liu C., Kang S-M, University of Illinois, CN
We present the electromechanical and microwave properties of a novel micromachined parallel-plate tunable capacitor with a wide tuning range. Different from conventional two-parallel-plate tunable capacitors, this novel tunable capacitor consists of one suspended top plate [...]

The Applicability of Temperature Correction to Chemoresistive Sensors in an e-NOSE-ANN System

Hobson R., Guiseppi-Elie A., Commonwealth University, US
The influence of the temperature sensitivity of chemoresistive, inherently-conductive-polymer (ICP) sensors on the performance of an artificial neural network (ANN) e-NOSE system is evaluated. Temperature was found to strongly influence the responses of t

Surface Chemistry Effects in Finite Element Modeling of Heat Transfer in µ-fuel Cells

Havstad M.A., Lawrence Livermore National Laboratory, US
Equations for modeling surface chemical kinetics by the interaction of gaseous and surface species are presented. The formulation is embedded in a finite element heat transfer code and an ordinary differential equation package is used [...]

Modeling and Analysis of Hysteresis Phenomena in Electrostatic Zipper Actuators

Guidotti P., Bernstein D., California Institute of Technology, US
We investigate the relationship between the pull-in phenomenon for electrostatic actuators and the hysteresis effect found in zipper actuators. Liked lumped mass and spring and tension based membrane models, we show that a beam model [...]

Vibration Analysis of Quartz Yaw-Rate Sensor to Reduce Mechanical Coupling

Fujiyoishi M., Nononmura Y., Omura Y., Tsukada K., Matsushige S., Kurata N., Toyota Central R&D Labs, JP
For a yaw-rate sensor (gyroscope), the reduction of mechanical coupling phenomenon is a key technology for achieving high performance. We analyze the phenomenon with a combination of two models, (1) a static model of a [...]

Thermal Frequency Drift of Resonant Microsensor

Shen F., Lu P., O'Shea S.J., Lee K.H., Pradhan S.C., Ng T.Y., Institute for High Performance Computing, SG
Thermal effects on the resonant frequency drift of a microsensor (a silicon cantilever beam with a gold coating) are studied. Two cases are investigated using analytical methods: uniform temperature distribution and linear temperature distribution along [...]

Simulation and Characterization of High Q Microresonators Fabricated by UV – LIGA

Basrour S., Majjad H., Coudevylle J.R., Coudevylle J.R., de Labachèlerie M., CNRS, FR
This paper is devoted to a study on a new metallic microresonator realized by UV-LIGA technique. This device is excited electrostatically and takes advantage of the contour modes or Lamé-modes of the structure. Design methods [...]

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