MEMS & NEMS Devices, Modeling & Applications – Page 56

High Resolution Silicon Accelerometer Using Eutectic Bonding

Kwang Y., Yeon J.C., Kim Y.H., Rhee S.W., Oh S.H., Seoul National University, KR

High precision micro-accelerometers are used in many applications such as automotives, aviations and aerospace navigation systems. In this paper, a lateral capacitive micro-accelerometer with _g level resolution has been designed and fabricated using simple micromachining [...]

Low Volume, Large Force (>1mN) and Nanometer Resolution Electrostatic Microactuator for Low Displacement Applications

Sarajlic E., Berenschot E., Krijnen G., Elwenspoek M., University of TWente, NL

An electrostatic microactuator suitable for low displacement applications is successfully fabricated and tested. A large force (>1mN) with a controllable nanometer resolution step (

Coupling Spring Design and Insertion Loss Minimization of Second Order MicroElectroMechanical Filters

Naseer M., Parlak M., Bechteler T., Gurbuz Y., Sabanci University, TR

Micromechanical resonators based filters are considered as potential replacements of prevalent tank circuits due to their high selectivity and on chip integration compatibility. Micromachined bandpass filters have been operated both in HF and IF regions [...]

Modeling the Electro-Thermal Response of Thermally Isolated Micromachined Distributed Structures

Socher E., Bochobza-Degani O., Elata D., Nemirovsky Y., Israel Institute of Technology, IL

This work analyzes the electro-thermal behavior of thermally isolated micromachined resistive structures. A novel numerical scheme for solving the coupled electro-thermal problem is suggested. The novel scheme can capture the thermal instabilities under both voltage [...]

Simulation of a Diamond-Based Bistable Thermal Microswitch

Schmid P., Hernandez-Guillen F.J., Kohn E., University of Ulm, DE

A novel bistable layout for a thermally driven microswitch based on polycrystalline diamond has been developed and evaluated by simulations. The device is based on a double-anchored, free standing diamond beam, which buckles due to [...]

Optimization of Thermally Actuated Bimorph Cantilevers for Maximum Deflection

Peng W., Xiao Z., Farmer K.R., New Jersey Institute of Technology, US

Theoretical analysis of thermally actuated bimorph cantilevers is presented to find the optimum condition for maximum deflection. The relations between material properties, dimensions and deflections are discussed in detail to understand the mechanism. Optimum condition [...]

New Micro Hydro Power Device

Pobering S., Schwesinger N., Münich University of Technology, DE

We have focused our research to new principles of converting energy by means of microstructured components. It is possible to extend the usable water power recourses by converting the kinetic energy directly. This type of [...]

A New Method of Excluding The External Acceleration’s Effect in a Micromachined Magnetometer for Navigation Systems

Cho J-M, Kim K.S., An S.D., Park H.J., Hahm G., Samsung Electromechanics Co., LTD., KP

A new type of magnetometer-accelerometer is developed with a silicon micromachining. The operation principle of the sensor is based on the well known Lorentz force caused by the interaction of a current and an external [...]

Mechanical Damping due to Interface Motion in Micro-Resonators

Pawaskar D.N., Phillips R., California Institute of Technology, US

Mechanical damping strongly influences the sensitivity and resolution of nano-sensors and actuators. In this paper, we have investigated one of the key intrinsic mechanisms responsible for dissipation of vibrational energy in beams composed of a [...]

Modeling and Optimal Design of High Sensitivity Piezoresistive Microcantilevers for Biosensing Applications

Yang M., Zhang X., Ozkan C.S., University of California Riverside, US

We discuss the mechanical design and optimization of piezoresistive microcantilevers for use in detecting changes in surface stress upon analyte-receptor binding. Conventional microcantilevers are used along with an optical detection system in many commercially available [...]