Preparation of PZT nanodots on Nano-Templated Substrates
McMillen M.J.A., Lookman A., Douglas C, Evans P, Bowman R.M., Gregg J.M., Pollard R.J., Queen's University, Belfast & Nanotec NI, UK
There is considerable interest in creation of nanoscale capacitor arrays. For example, in FeRAM technology, which has great potential, significant capacitor cell size reduction and transition to 3D structures, can be achieved within existing CMOS [...]