Sensors, MEMS, Electronics – Page 380

Modeling and Optimization of Bi-stable Optical Switch

Maekoba H., Helin P., Reyne G., Bourouina T., Fujita H., Cybernet Systems Co. Ltd., JP

High performance silicon-based, micro-optical switch are being developed for application to optical networks. The mechanical part was fabricated in a one-level mask step by bulk micromachining of (100) monocrystalline silicon with KOH. The resulting structure [...]

Compact Damping Models for Lateral Structures Including Gas Rarefaction Effects

Veijola T., Helsinki University of Technology, FI

Compact models for the viscous damping coefficient in narrow air gaps between laterally moving structures are reported. The gas rarefaction effects are included in these small-displacement models. In the first part of the paper, a [...]

Investigation of the Dynamics of Microdevices – As a Design Tool

Seter D.J., Degani O., Kaldor S., Scher E., Nemirovsky Y., RAFAEL Microsystems Group, IL

When designing microaccelerometers, microgyroscopes and other microdevices, there is a strong need for dynamic understanding in system level. Thus, dynamic simulation is a part of many CAD tools for MEMS [1]. In this work, a [...]

Electrostatic Spring Effect on the Dynamic Performance of Micro Resonators

Francis E.H., Kumaran R., Chua B.L., Logeeswaran V.J., National University of Singapore, SG

This paper reports on the significant discrepancy between the analytical and experimental resonant frequencies of the folded beam micro resonators. Experimental results for the resonant frequency showed a consistent 20% discrepancy over theoretical and finite [...]

Layout Synthesis of CMOS MEMS Accelerometers

Gupta V., Mukherjee T., Carnegie Mellon University, US

An optimal layout synthesis methodology for CMOS MEMS accelerometers is presented. It consists of a parame-trized layout generator that optimizes design objectives while meeting functional specifications. The behavior of the device is estimated using lumped [...]

Macro-Modeling of Systems Including Free-Space Optical MEMS

Kurzweg T.P., Morris A.S., Uiversity of Pittsburgh, US

One barrier to the integration of MEMS devices into optical systems is the lack of a system-level CAD tool allowing the optimization of MOEMS designs simultaneously with embedding control electronics. Our work addresses this issue [...]

Towards Microelectrofluidic System (MEFS) Computing and Architecture

Dewey A., Fair R.B., Jopling J., Ding J., Zhang T., Cao F., Schreiner B., Pollack M., Duke University, US

This paper presents the rationale, design, and simulation of next-generation microelectro fluidic system computational architectures for the emerging field of bioinformatics. Current microelectro fluidic processors (e.g. biochips) have largely dedicated architectures supporting relatively specialized applications. [...]

Methodology of Macromodeling Demonstrated on Force Feedback S/D-Architectures

Hardtmann M., Aigner R., Nadal R., Wachutka G., Münich University of Technology, DE

Design and verification of complete microsystems require effective models of the micromechanical components for the simulation at system level. Particularly for force feedback S/D-architectures, long transient simulations are inevitable to characterize the system-inherent signal pro-cessing. [...]

Compact MEMS Modeling for Design Studies

Voigt P., Wachutka G., University of Technology, DE

A method for MEMS macromodel development is presented which is based on a physical device description to obrain mathematical relations for the device operation. Since design and technlogy parameters are input parameters of the resulting [...]

System Level Simulation of an Electrostatically Levitated Disk

Kraft M., Evans A., University of Southampton, UK

This paper describes the derivation of a system-level model for a micromachined disk which is levitated by electrostatic forces. Such a system has many potential applications for inertial sensors, micro-motors, microfluidic and micro-optical devices. As [...]