Sensors, MEMS, Electronics – Page 316

Magnetic Diffusion in Nonlinear Micro-Media: A Modified Finite-Difference Time-Domain Approach

Cros F., Allen M.G., Lang J.H., Massachusetts Institute of Technology, US

As flux densities and frequencies are raised to increase the performance of magnetic micro-actuators, micro-motors/generators, and micro-inductors, eddy currents and magnetic saturation start to limit the performance of these devices. In this paper, we present [...]

MEMS Design and Application

Microsensors, Arrays and Automatic Diagnosis of Sensor Faults

Gaura E., Newman R.M., Coventry University, UK

As man-made dynamical systems become increasingly complex, there is an ever-present need to ensure their safe and reliable operation [1]. These requirements extend beyond the normally accepted safety-critical systems (e.g. nuclear reactors, chemical plants, and [...]

Microsystem Modeling – from Macromodels to Microsystem Design

Husak M., University of Prague, CZ

The paper presents ideas about possible approaches to development of microsystem models. From the general point of view, microsystem (MST) is considered as a system dealing with non-electrical quantities from all energy domains of real [...]

The Monolithic Integration of 6H-SiC Electronics with 6H-SiC MEMS for Harsh Environment Applications

Hailu E., Atwell A.R., Duster J.S., Li C., Balseanu M., Kornegay K.T., Cornell University, US

We report the development of a design and fabrication methodology for the first monolithic integration of silicon carbide (SiC) MEMS sensors with SiC-based electronic amplification and control circuitry. MEMS and circuit integration on silicon has [...]

Using Very Large Arrays of Intelligent Sensors

Newman R.M., Coventry University, UK

In 1994 the author patented an intelligent vibration sensor. The device was essentially an accelerometer with integrated analog and digital processing capability as shown in figure 1, which allowed a large proportion of the diagnostic [...]

Smart MEMS and Sensor Systems

Layout Verification by Extraction for Micro Total Analysis Systems

Baidya B., Mukherjee T., Carnegie Mellon University, US

The increasing complexity of MicroTotalAnalysis Systems is leading to a growing need for verification tools for such designs. Numerical simulation of such designs are slow, memory consuming and practically impossible for large designs. Schematic-based simulation [...]

Quasi-static Motion of Bubbles in Microchannel Contractions

Jensen M.J., Goranovic G., Bruus H., Technical University of Denmark, DK

We present a thorough theoretical and computational study of bubble dynamics in icrofluidic channels with contractions. We investigate the effects of geometry and surface physics (friction and contact angle) on the behavior of incompressible bubbles, [...]

CFD-based Optimization of Gas/Liquid Microreactors with Droplet and Bubble Transport

Hardt S., Pennemann H., Jiang F., Institute of Microtechnology Mainz, DE

Microreactors offer unique opportunities for the control of process parameters unparalleled by macroscopic equipment. A new gas/liquid microreactor is proposed allowing for fast mass transfer and small concentration gradients as well as a very narrow [...]