Advanced Materials & Manufacturing – Page 275

Comparison of Electrical performance of Symmetric Toggle Switch with different dielectric layers

Maninder K., Central Electronics Engineering Research Institute, IN

This paper presents the electrical performance comparison of Symmetric Toggle RF MEMS Switch (STS), by incorporating hafnium oxide (HfO2) as a dielectric material instead of silicon dioxide (SiO2). Fig. 1(a) and (b) shows the 3-D [...]

High Sensitivity Dielectric Filled Lamé Mode Resonator for Chemical and Biological Applications

Heidari A., Yoon YJ., Park WT., Lin J.T.M., Nanyang Technological University, SG

In recent years the use of micro and nano electromechanical (MEMS/NEMS) resonators for mass sensing applications has been extensively explored. In many applications, high sensitivity biomass sensors are required to sense small biological entities (e.g. [...]

Control of MEMS-Technology Axial Topology MicroServos

Lyshevski S.E., Rochester Institute of Technology, US

Concurrent microsystems design, optimization, data-intensive analysis and hardware-software co-design of digital high-performance microelectromechanical systems (MEMS) have become major challenging themes. The major goal of this paper is to report-and-apply viable methodologies for design–and–implementation of MEMS [...]

A Pressure Sensor Array with Sensing Ragnes Tunable by Drving Frequency

Lai Y.-T., Yang Y-J, National Taiwan University, TW

This work presents the development of a novel pressure sensing array which sensing ranges are tunable during operation. The sensing element consists of carbon nanotubes (CNT) dispersed in nematic liquid crystals composites. The sensing ranges [...]

Design and Fabrication of a Metallic MEMS Gripper Using Electro-Thermal V-Shape and Modified U-Shape Actuators

Khazaai J.J., Qu H., Shillor M., Smith L., Oakland University, US

This abstract reports on the design, fabrication, and characterization of a distinctive MEMS gripper electro-thermally driven by the new metallic (electroplated nickel) V-shape actuator (VSA) and the modified U-shape actuators (mUSA). The VSA and the [...]

SC Cavities Fast Tuning System Based on Piezoelectric Actuators

Przygoda K., Pozniak T., Napieralski A., Sekalski P., Grecki M., Technical University of Lodz, PL

The main part of linear accelerator (linac), used for driving the Free-Electron Laser (FEL) machine, is superconducting (SC) resonant cavity. The SC cavity is very susceptible to small changes in dimension because of a very [...]

Fabrication and analysis of MEMS test structures for residual stress measurement

Sharma A., Kaur M., Bansal D., Kumar D., Rangra K., Central Electronics Engineering Research Institute (CEERI/ CSIR), IN

A set of microstructures for in situ stress measurement is presented. It is based on lancet principle, with dedicated design for the amplification of the dimensional variations induced by the internal stress of the structural [...]

Multi-purpose tool for checking the microfabrication products

De Pasquale G., Somà A., Politecnico di Torino, IT

This paper introduces a multi-purpose tool addressed to the microfabrication processes monitoring and material property measurement at the wafer level during both process development and manufacturing. The on-line testing tool presented in this paper is [...]

Fabrication of Nano-structures of NiTi Shape Memory Films and Investigations on Size dependence of their Mechanical Properties

Sharma S.K., Mohan S., Indian Institute of Science, Bangalore, IN

Focused Ion Beam (FIB) micro-machining technique has been used to generate various nano-structures on NiTi shape memory alloy films. The fabrication and nano-mechanical investigations of the nano-structures have been included in this paper.

An Improved Micro Injection Molding Technique for Grating Devices

Li H.S., Liu K.C., Hsieh W.H., Au L.K.C., Liu K.C., National Chung Cheng University, TW

There is a new method about grating fabrication in our submission abstract. This method can help us to fabricate micro or nano devices more easily and inexpensively. I think it is very suitable for this [...]