This paper presents system level modelling and simulations results of two closed loop, force-feedback control strategies for micromachined tunnelling accelerometers. The first approach is based on the incorporation of the sensing element in a sigma-delta modulator loop. The second strategy relies on two artificial neural networks (ANN) for both controlling the sensor and linearising the feedback loop. Both approaches have their merits and disadvantages. The former results in a direct digital sensor but it may prove problematic to achieve sufficiently high signal to quantisation noise ratios. The latter requires the use of an analogue to digital converter (at the output of the pick-off circuit) but has the advantage of achieving better measurement linearity.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 518 - 521
Industry sector: Sensors, MEMS, Electronics
Topics: Modeling & Simulation of Microsystems