Surface Micromachined Viscous Spiral Pump

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This paper introduces a new viscous micropump produced using surface micromachining technology. The pump consists of a disk with a spiral protrusion that rotates at a close proximity over a stationary plate. Fluid contained in the spiral channel created by this geometry is subject to a net tangential viscous stress and a positive pressure gradient is established in the direction of flow. The paper describes the design and fluid modeling of the micro spiral pump.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Published: February 23, 2003
Pages: 210 - 213
Industry sectors: Medical & Biotech | Sensors, MEMS, Electronics
Topics: Micro & Bio Fluidics, Lab-on-Chip
ISBN: 0-9728422-0-9