Varghese M., Rabinovich V.L., Senturia S.D.
Massachusetts Institute of Technology, US
Keywords: energy method, Lorentz force, macro-model, magnetics, MEMS
We present a method for generating dynamic reduced-order models for Lorentz force actuation in microelectromechanical systems (MEMS). These models, derived from a set of meshed simulations, are analytical representations of the magnetic co-energy of a system. The representations are expressed as functions of harmonic mode amplitudes. By calculating analytical gradients of the co-energy with respect to the mode amplitudes, we find the Lorentz forces. Magnetic and mechanical energy domains are then coupled together by inserting Lorentz forces and mechanical forces into modal equations of motion.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 155 - 158
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6