Cartwright D., Csanak G., George D., Walker R., Kuprat A., Dengi A., Grobman W.
Los Alamos National Laboratory, US
Keywords: capacitance extraction, dielectrics, finite element, interconnects, unstructured grid
A new tool has been developed for calculating the capacitance matrix for complex 3D interconnect structures involving multiple layers of irregularly shaped interconnect, imbedded in different dielectric materials. This method utilizes a new 3D adaptive unstructured grid capability, and a linear finite element algorighm. The capacitance is determined from the minimum in the total system energy as the nodes are varied to minimize the error in the electric field in the dielectric(s).
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 159 - 162
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems