Chen J., Coperich K.M., Kang S-M, Schutt-Aine J.
University of Illinois at Urbana-Champaign, US
Keywords: micromechanical switch, modeling, S-parameter, transient simulation
This paper details new parameter extraction methods for microwave micromachined switches. Speciffically new methods for extracting switch turn-on and turn-off transient behavior and switch electromagnetic behavior are discussed. The accuracy of these methods are verified by comparison between simulation results and experimental measurements.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 190 - 193
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6