Papers – Page 950 – TechConnect Briefs

Operation and Testing of a Micro Heat Engine

Whalen S., Richards C., Richards R., Bahr D., Richards C., Richards R., Washington State University, US

The development and testing of a micro heat engine is presented. For the first time the production of electrical power by a dynamic micro heat engine is demonstrated. The prototype micro heat engine is an [...]

FEM Assisted Design of Novel Electrothermal Actuators

Deladi S., Krijnen G., Elwenspoek M., University of TWente, NL

The demand for powerful actuators, which can be embedded into MEMS devices draws attention to electrothermal actuators, although there can be drawbacks such as the heat created during actuation. The main advantage is the low [...]

High Resolution Silicon Accelerometer Using Eutectic Bonding

Kwang Y., Yeon J.C., Kim Y.H., Rhee S.W., Oh S.H., Seoul National University, KR

High precision micro-accelerometers are used in many applications such as automotives, aviations and aerospace navigation systems. In this paper, a lateral capacitive micro-accelerometer with _g level resolution has been designed and fabricated using simple micromachining [...]

Low Volume, Large Force (>1mN) and Nanometer Resolution Electrostatic Microactuator for Low Displacement Applications

Sarajlic E., Berenschot E., Krijnen G., Elwenspoek M., University of TWente, NL

An electrostatic microactuator suitable for low displacement applications is successfully fabricated and tested. A large force (>1mN) with a controllable nanometer resolution step (

Coupling Spring Design and Insertion Loss Minimization of Second Order MicroElectroMechanical Filters

Naseer M., Parlak M., Bechteler T., Gurbuz Y., Sabanci University, TR

Micromechanical resonators based filters are considered as potential replacements of prevalent tank circuits due to their high selectivity and on chip integration compatibility. Micromachined bandpass filters have been operated both in HF and IF regions [...]

Modeling the Electro-Thermal Response of Thermally Isolated Micromachined Distributed Structures

Socher E., Bochobza-Degani O., Elata D., Nemirovsky Y., Israel Institute of Technology, IL

This work analyzes the electro-thermal behavior of thermally isolated micromachined resistive structures. A novel numerical scheme for solving the coupled electro-thermal problem is suggested. The novel scheme can capture the thermal instabilities under both voltage [...]

Simulation of a Diamond-Based Bistable Thermal Microswitch

Schmid P., Hernandez-Guillen F.J., Kohn E., University of Ulm, DE

A novel bistable layout for a thermally driven microswitch based on polycrystalline diamond has been developed and evaluated by simulations. The device is based on a double-anchored, free standing diamond beam, which buckles due to [...]

Optimization of Thermally Actuated Bimorph Cantilevers for Maximum Deflection

Peng W., Xiao Z., Farmer K.R., New Jersey Institute of Technology, US

Theoretical analysis of thermally actuated bimorph cantilevers is presented to find the optimum condition for maximum deflection. The relations between material properties, dimensions and deflections are discussed in detail to understand the mechanism. Optimum condition [...]

New Micro Hydro Power Device

Pobering S., Schwesinger N., Münich University of Technology, DE

We have focused our research to new principles of converting energy by means of microstructured components. It is possible to extend the usable water power recourses by converting the kinetic energy directly. This type of [...]

A New Method of Excluding The External Acceleration’s Effect in a Micromachined Magnetometer for Navigation Systems

Cho J-M, Kim K.S., An S.D., Park H.J., Hahm G., Samsung Electromechanics Co., LTD., KP

A new type of magnetometer-accelerometer is developed with a silicon micromachining. The operation principle of the sensor is based on the well known Lorentz force caused by the interaction of a current and an external [...]