Papers – Page 1060 – TechConnect Briefs

CMOS MEMS and their Simulation

Korvink J.G., Emmenegger M., Taschini S., Baltes H., ETH Zürich, CH

The most appropriate tools for the modelling and simulation of MEMS are strongly related to the technology used to fabricate them. CMOS MEMS are naturally combined with circuitry, and in a packaged form they are [...]

Challenges in Process Modeling for MEMS

Dutton R.W., Chan E.K., Wilson N.W., Hsiau Z-K, Shen S., Stanford University, US

The potency of the silicon IC technology base, its use of CAD for design targeted for manufacturing and the related challenges faced in deployment of MEMS are discussed. The rapidly growing field of MEMS has [...]