Papers – Page 1053 – TechConnect Briefs

Multi-Mode Sensitive Layout Synthesis of Microresonators

Iyer S., Mukherjee T., Fedder G.K., Carnegie Mellon University, US

Microresonator layouts are synthesized such that their preferred mode of oscillation is well-separated from the higher order in-plane and out-of-plane modes. Building on our previous work, we have incorporated models for four out-of-plane modes. All [...]

An Environment for MEMS Design and Verification

Bart S.F., Swart N.R., Mariappan M., Zaman M.H., Gilbert J.R., Microcosm Technologies, Inc., US

A comprehensive CAD software environment is presented for MEMS/MST design. It includes MEMS mechanical schematic entry, parameterized cell layout generation, automatic lumped parameter macro-model generation, and LVS style error checking. These tools allow for flexible [...]

Autonomous Agents Design for Digital Network Maximization in Joint C4I System

DaBose M.W., Luqi L., Naval Postgraduate School, US

The advent of the computer age has brought about an ever increasing demand to transfer exponentially increasing amounts of information, and the as ciated problems of information sharing. The focus of this pa is to [...]

Simulating 3-Dimensional Deep X-ray Lithography Using the CXrL Toolset

Aigeldinger G., Craft B., Menz W., Louisiana State University, US

Experimental evaluation of the dose distribution resulting from 3-dimensional deep x-ray lithography is often impractical. Computer modeling is a valuable tool for simulating this system. Preliminary simulations of 3-dimensional, deep, xray lithography exposures have been [...]

Layout Verification Tools for MEMS Physical Design

Hahn K., Brück R., Reusch B., Universitat Dortmund, DE

The impact of technoloDy related issues in microsystem physica] design is of hiah relevance due to the fact that mask layout and process configuration are strongly interdependant. Performing physical design in this area therefore means [...]

Computer Aided Modeling of Static and Dynamic Transfer Characteristics

Anton M., Bechtold S., Nüssen O., Laur R., University of Bremen, DE

When creating mathematical models of microsystem components or microelectronic devices, analytical and experimental modeling concepts can be distinguished. Analytical modeling, often performed on process or device level, can only be applied if the equations and [...]

Archives: Papers

Multi-Mode Sensitive Layout Synthesis of Microresonators

An Environment for MEMS Design and Verification

Autonomous Agents Design for Digital Network Maximization in Joint C4I System

Simulating 3-Dimensional Deep X-ray Lithography Using the CXrL Toolset

Layout Verification Tools for MEMS Physical Design

Computer Aided Modeling of Static and Dynamic Transfer Characteristics

SEGS: On-line WWW Etch Simulator

Systematic Design of Electrothermomechanical Microactuators using Topology Optimization

Design Optimization of Microsystems

Dispersive Media in FDTD-Comparison of Recursive Convolution and Auxiliary Differential Equation Methods