Papers – Page 1018 – TechConnect Briefs

Closed-Loop, Neural Network Controlled Accelerometer Design

Gaura E.I., Ferreira N., Rider R.J., Steele N., Coventry University, UK

In this paper, a closed-loop, smart transducer design is proposed, based on artificial neural network (ANN) techniques. The design aims to improve the performance of open-loop, off-the-shelf capacitive acceleration sensors and increase their robustness to [...]

Nonlocal Problems in MEMS Device Control

Pelesko J.A., Triolo A.A., Georgia Institute of Technology, US

Perhaps the most ubiquitous phenomena associated with electrostatically actuated MEMS devices is the "pull-in" voltage instability. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer a steady-state [...]

A Novel Approach to Simulate the Potential at the Center Axis of Poisson’s Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes

Kwok D.T.K., Zeng Z.M., Chu P.K., City University of Hong Kong, CN

A novel and practical method is developed to resolve the three dimensional Poisson’s and Laplace’s equation at the center axis in cylindrical coordinates. The method employs the rectangular xyz co-ordinates to solve the potential f [...]

Finite Element Based Electrostatic-Structural Coupled Analysis with Automated Mesh Morphing

Zhulin V.I., Owen S.J., Ostergaard D.F., ANSYS, Inc., US

A co-simulation tool based on finite element principles has been developed to solve coupled electrostatic-structural problems. An automated mesh morphing algorithm has been employed to update the field mesh after structural deformation. The co-simulation tool [...]

Co-simulation and Optimization Micro Electro Mechanical Systems by Using Method of Theoretical Investigation

Mkrttchian V., State Engineering University of Armenia, AM

Before elaboration and designing of micro electromechanical systems (MEMS) it is very important to carry out an appropriate computer modeling for analyzing and optimizing. To describe adequately the physical phenomenon talking place in MEMS it [...]

Reduced-Order Models of Stress-Stiffened MEMS Structures

Varghese M., Rabinovich V.L., Senturia S.D., Massachusetts Institute of Technology, US

We present a process for generating reduced-order models for stress-stiffened MEMS structures. The models are created using the established CHURN process, which uses non-linear, analytic, energy functions to describe the state of each conservative quasi-static [...]

Mathematical Analysis of Electrostatically Actuated MEMS Devices

Bernstein D., Guidotti P., Pelesko J.A., California Institute of Technology, US

We perform a rigorous mathematical analysis of a simple membrane based model of an electrostatiacallyh actuated MEMS device. Using both analytical and numerical techniques, we prove the existence of a fold in the solution space [...]

Nonlinear Analysis of Electrostatic Actuation in MEMS with Arbitrary Geometry

Taschini S., Baltes H., Korvink J.G., ETH-Hoenggerberg, CH

We present an explicit formulation for the Jacobian (or tan-gent) matrix of the discretized non-linear model for a cou-pled electromechanical system. The Jacobian matrix, consisting of the derivatives of the residual, is needed in Newton-Raphson-based [...]

A Novel Approach for Determining Pull-In Voltages in Micro-electro-mechanical Systems (MEMS)

Long D.S., Shannon M.A., Aluru N.R., University of Illinois at Urbana-Champaign, US

In this paper we introduce a novel method, based on the Lagrange Multiplier Method (LMM), for calculating pull-in voltages in MEMS. This method combines the finite-element with a displacement constraint and boundary element method. The [...]

A Quadratic Method for Nonlinear Model Order Reduction

Chen Y., White J.K., Massachusetts Institute of Technology, US

In order to simulate and optimize effciently systems which include micromachined devices, designers need dynamically accurate macromodels for the those devices. Although it is possible to develop such macromodels by hand, it would be vastly [...]