Lienemann J., Greiner A., Korvink J.G., Sigmund O.
Albert Ludwig University, DE
Keywords: Hall plate, Integrated magnetic field sensor, offset, sensitivity, topology optimization
We present an optimization strategy for the offset reduction of integrated magnetic field sensors with simultaneous maximization of sensitivity. We use the topology optimization method to automatically find a design with maximal sensitivity for given constraints on the offset by changing the conductivity of the Hall plate locally.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 120 - 123
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4