Tayebi A.K., Tayebi N., Tayebi A.K., Tayebi N.
Case Western Reserve University, US
Keywords: boundary element methods, linear elastic fracture mechanics, MEMS reliability, meshless methods, numerical methods
Non-conventional finite element analysis (FEA) based on linear elastic fracture mechanics (LEFM) is applied to fractured MEMS specimens with notches. The objective of this paper is to test the applicability of LEFM at mesoscale and to evaluate the application of newly developed FEA methods to MEMS fracture analysis. The displacement discontinuity method and the element free Galerking meshless method are used. The tested cases consisted of specimens in the form of notched cantilever beams, and double cantilever beams suspended by an anchor by two thin beams. A good correlation with some experiments is obtained.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 491 - 494
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6